3/13/2011	12:09:30 AM	H2 valve closed
3/13/2011	12:09:30 AM	BCl3 valve closed
3/13/2011	12:09:30 AM	PH3 valve closed
3/13/2011	12:09:30 AM	SiCl4 pre valve closed
3/13/2011	12:09:30 AM	SiCl4 post valve closed
3/13/2011	12:09:30 AM	Main Vac valve closed
3/13/2011	12:09:30 AM	Bypass valve closed
3/13/2011	12:09:30 AM	Helium valve opened
3/13/2011	12:09:30 AM	Bubbler valve opened
3/13/2011	12:09:30 AM	Helium MFC set to  500.000000
3/13/2011	12:09:30 AM	H2 MFC set to  0.000000
3/13/2011	12:09:30 AM	BCl3 MFC set to  0.000000
3/13/2011	12:09:30 AM	PHl3 MFC set to  0.000000
3/13/2011	12:09:30 AM	SiCl4 MFC set to  0.000000
3/13/2011	12:09:30 AM	Bypass solenoid MFC set to  0.000000
3/13/2011	12:09:30 AM	Tube furnace set to 0
3/13/2011	12:29:30 AM	Helium valve closed
3/13/2011	12:29:30 AM	H2 valve closed
3/13/2011	12:29:30 AM	BCl3 valve closed
3/13/2011	12:29:30 AM	PH3 valve closed
3/13/2011	12:29:30 AM	SiCl4 pre valve closed
3/13/2011	12:29:30 AM	SiCl4 post valve closed
3/13/2011	12:29:30 AM	Main Vac valve closed
3/13/2011	12:29:30 AM	Bypass valve closed
3/13/2011	12:29:30 AM	Bubbler valve closed
3/13/2011	12:29:30 AM	Helium MFC set to  0.000000
3/13/2011	12:29:30 AM	H2 MFC set to  0.000000
3/13/2011	12:29:30 AM	BCl3 MFC set to  0.000000
3/13/2011	12:29:30 AM	PHl3 MFC set to  0.000000
3/13/2011	12:29:30 AM	SiCl4 MFC set to  0.000000
3/13/2011	12:29:30 AM	Bypass solenoid MFC set to  0.000000
3/13/2011	12:29:31 AM	Tube furnace set to 0
3/13/2011	12:29:31 AM	Run finished at 12:29 AM
3/13/2011	1:01:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2011	1:02:00 AM	Recipe started at 1:02 AM
3/13/2011	1:02:00 AM	H2 valve closed
3/13/2011	1:02:00 AM	BCl3 valve closed
3/13/2011	1:02:00 AM	PH3 valve closed
3/13/2011	1:02:00 AM	SiCl4 pre valve closed
3/13/2011	1:02:00 AM	SiCl4 post valve closed
3/13/2011	1:02:00 AM	Main Vac valve closed
3/13/2011	1:02:00 AM	Bypass valve closed
3/13/2011	1:02:00 AM	Bubbler valve closed
3/13/2011	1:02:00 AM	Helium valve opened
3/13/2011	1:02:00 AM	Helium MFC set to  500.000000
3/13/2011	1:02:00 AM	H2 MFC set to  0.000000
3/13/2011	1:02:00 AM	BCl3 MFC set to  0.000000
3/13/2011	1:02:00 AM	PHl3 MFC set to  0.000000
3/13/2011	1:02:00 AM	SiCl4 MFC set to  0.000000
3/13/2011	1:02:00 AM	Bypass solenoid MFC set to  0.000000
3/13/2011	1:02:00 AM	Tube furnace set to 0
3/13/2011	1:02:08 AM	Helium valve closed
3/13/2011	1:02:08 AM	H2 valve closed
3/13/2011	1:02:08 AM	BCl3 valve closed
3/13/2011	1:02:08 AM	PH3 valve closed
3/13/2011	1:02:08 AM	SiCl4 pre valve closed
3/13/2011	1:02:08 AM	SiCl4 post valve closed
3/13/2011	1:02:08 AM	Main Vac valve closed
3/13/2011	1:02:08 AM	Bypass valve closed
3/13/2011	1:02:08 AM	Bubbler valve closed
3/13/2011	1:02:08 AM	Helium MFC set to  0.000000
3/13/2011	1:02:08 AM	H2 MFC set to  0.000000
3/13/2011	1:02:08 AM	BCl3 MFC set to  0.000000
3/13/2011	1:02:08 AM	PHl3 MFC set to  0.000000
3/13/2011	1:02:08 AM	SiCl4 MFC set to  0.000000
3/13/2011	1:02:08 AM	Bypass solenoid MFC set to  0.000000
3/13/2011	1:02:08 AM	Tube furnace set to 0
3/13/2011	1:02:09 AM	Run finished at 1:02 AM
3/13/2011	1:02:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2011	1:03:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2011	1:03:35 AM	Recipe started at 1:03 AM
3/13/2011	1:03:35 AM	Helium valve closed
3/13/2011	1:03:35 AM	H2 valve closed
3/13/2011	1:03:35 AM	BCl3 valve closed
3/13/2011	1:03:35 AM	PH3 valve closed
3/13/2011	1:03:35 AM	SiCl4 pre valve closed
3/13/2011	1:03:35 AM	SiCl4 post valve closed
3/13/2011	1:03:35 AM	Main Vac valve closed
3/13/2011	1:03:35 AM	Bubbler valve closed
3/13/2011	1:03:35 AM	Bypass valve opened
3/13/2011	1:03:35 AM	Helium MFC set to  0.000000
3/13/2011	1:03:35 AM	H2 MFC set to  0.000000
3/13/2011	1:03:35 AM	BCl3 MFC set to  0.000000
3/13/2011	1:03:35 AM	PHl3 MFC set to  0.000000
3/13/2011	1:03:35 AM	SiCl4 MFC set to  0.000000
3/13/2011	1:03:35 AM	Bypass solenoid MFC set to  0.000000
3/13/2011	1:03:35 AM	Tube furnace set to 0
3/13/2011	1:04:07 AM	Helium valve closed
3/13/2011	1:04:07 AM	H2 valve closed
3/13/2011	1:04:07 AM	BCl3 valve closed
3/13/2011	1:04:07 AM	PH3 valve closed
3/13/2011	1:04:07 AM	SiCl4 pre valve closed
3/13/2011	1:04:07 AM	SiCl4 post valve closed
3/13/2011	1:04:07 AM	Bubbler valve closed
3/13/2011	1:04:07 AM	Main Vac valve opened
3/13/2011	1:04:07 AM	Bypass valve opened
3/13/2011	1:04:07 AM	Helium MFC set to  0.000000
3/13/2011	1:04:07 AM	H2 MFC set to  0.000000
3/13/2011	1:04:07 AM	BCl3 MFC set to  0.000000
3/13/2011	1:04:07 AM	PHl3 MFC set to  0.000000
3/13/2011	1:04:07 AM	SiCl4 MFC set to  0.000000
3/13/2011	1:04:07 AM	Bypass solenoid MFC set to  0.000000
3/13/2011	1:04:07 AM	Tube furnace set to 0
3/13/2011	1:04:07 AM	Run finished at 1:04 AM
3/13/2011	1:04:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2011	2:46:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2011	2:46:08 PM	Recipe started at 2:46 PM
3/13/2011	2:46:08 PM	H2 valve closed
3/13/2011	2:46:08 PM	BCl3 valve closed
3/13/2011	2:46:08 PM	PH3 valve closed
3/13/2011	2:46:08 PM	SiCl4 pre valve closed
3/13/2011	2:46:08 PM	SiCl4 post valve closed
3/13/2011	2:46:08 PM	Main Vac valve closed
3/13/2011	2:46:08 PM	Bypass valve closed
3/13/2011	2:46:08 PM	Bubbler valve closed
3/13/2011	2:46:08 PM	Helium valve opened
3/13/2011	2:46:08 PM	Helium MFC set to  500.000000
3/13/2011	2:46:08 PM	H2 MFC set to  0.000000
3/13/2011	2:46:08 PM	BCl3 MFC set to  0.000000
3/13/2011	2:46:08 PM	PHl3 MFC set to  0.000000
3/13/2011	2:46:08 PM	SiCl4 MFC set to  0.000000
3/13/2011	2:46:08 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	2:46:08 PM	Tube furnace set to 0
3/13/2011	2:47:29 PM	Helium valve closed
3/13/2011	2:47:29 PM	H2 valve closed
3/13/2011	2:47:29 PM	BCl3 valve closed
3/13/2011	2:47:29 PM	PH3 valve closed
3/13/2011	2:47:29 PM	SiCl4 pre valve closed
3/13/2011	2:47:29 PM	SiCl4 post valve closed
3/13/2011	2:47:29 PM	Main Vac valve closed
3/13/2011	2:47:29 PM	Bypass valve closed
3/13/2011	2:47:29 PM	Bubbler valve closed
3/13/2011	2:47:29 PM	Helium MFC set to  0.000000
3/13/2011	2:47:29 PM	H2 MFC set to  0.000000
3/13/2011	2:47:29 PM	BCl3 MFC set to  0.000000
3/13/2011	2:47:29 PM	PHl3 MFC set to  0.000000
3/13/2011	2:47:29 PM	SiCl4 MFC set to  0.000000
3/13/2011	2:47:29 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	2:47:29 PM	Tube furnace set to 0
3/13/2011	2:47:29 PM	Run finished at 2:47 PM
3/13/2011	2:47:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2011	2:52:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2011	2:52:36 PM	Recipe started at 2:52 PM
3/13/2011	2:52:36 PM	Helium valve closed
3/13/2011	2:52:36 PM	H2 valve closed
3/13/2011	2:52:36 PM	BCl3 valve closed
3/13/2011	2:52:36 PM	PH3 valve closed
3/13/2011	2:52:36 PM	SiCl4 pre valve closed
3/13/2011	2:52:36 PM	SiCl4 post valve closed
3/13/2011	2:52:36 PM	Main Vac valve closed
3/13/2011	2:52:36 PM	Bubbler valve closed
3/13/2011	2:52:36 PM	Bypass valve opened
3/13/2011	2:52:36 PM	Helium MFC set to  0.000000
3/13/2011	2:52:36 PM	H2 MFC set to  0.000000
3/13/2011	2:52:36 PM	BCl3 MFC set to  0.000000
3/13/2011	2:52:36 PM	PHl3 MFC set to  0.000000
3/13/2011	2:52:36 PM	SiCl4 MFC set to  0.000000
3/13/2011	2:52:36 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	2:52:36 PM	Tube furnace set to 0
3/13/2011	2:53:08 PM	Helium valve closed
3/13/2011	2:53:08 PM	H2 valve closed
3/13/2011	2:53:08 PM	BCl3 valve closed
3/13/2011	2:53:08 PM	PH3 valve closed
3/13/2011	2:53:08 PM	SiCl4 pre valve closed
3/13/2011	2:53:08 PM	SiCl4 post valve closed
3/13/2011	2:53:08 PM	Bubbler valve closed
3/13/2011	2:53:08 PM	Main Vac valve opened
3/13/2011	2:53:08 PM	Bypass valve opened
3/13/2011	2:53:08 PM	Helium MFC set to  0.000000
3/13/2011	2:53:08 PM	H2 MFC set to  0.000000
3/13/2011	2:53:08 PM	BCl3 MFC set to  0.000000
3/13/2011	2:53:08 PM	PHl3 MFC set to  0.000000
3/13/2011	2:53:08 PM	SiCl4 MFC set to  0.000000
3/13/2011	2:53:08 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	2:53:08 PM	Tube furnace set to 0
3/13/2011	2:53:08 PM	Run finished at 2:53 PM
3/13/2011	2:53:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2011	2:53:19 PM	Tube furnace set to 200
3/13/2011	2:54:07 PM	Helium MFC set to  100.000000
3/13/2011	2:54:08 PM	Helium valve opened
3/13/2011	2:54:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2011	2:54:40 PM	Recipe started at 2:54 PM
3/13/2011	2:54:40 PM	Helium valve closed
3/13/2011	2:54:40 PM	H2 valve closed
3/13/2011	2:54:40 PM	BCl3 valve closed
3/13/2011	2:54:40 PM	PH3 valve closed
3/13/2011	2:54:40 PM	SiCl4 pre valve closed
3/13/2011	2:54:40 PM	SiCl4 post valve closed
3/13/2011	2:54:40 PM	Main Vac valve closed
3/13/2011	2:54:40 PM	Bubbler valve closed
3/13/2011	2:54:40 PM	Bypass valve opened
3/13/2011	2:54:40 PM	Helium MFC set to  0.000000
3/13/2011	2:54:40 PM	H2 MFC set to  0.000000
3/13/2011	2:54:40 PM	BCl3 MFC set to  0.000000
3/13/2011	2:54:40 PM	PHl3 MFC set to  0.000000
3/13/2011	2:54:40 PM	SiCl4 MFC set to  0.000000
3/13/2011	2:54:40 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	2:54:41 PM	Tube furnace set to 0
3/13/2011	2:54:41 PM	Helium valve closed
3/13/2011	2:54:41 PM	H2 valve closed
3/13/2011	2:54:41 PM	BCl3 valve closed
3/13/2011	2:54:41 PM	PH3 valve closed
3/13/2011	2:54:41 PM	SiCl4 pre valve closed
3/13/2011	2:54:41 PM	SiCl4 post valve closed
3/13/2011	2:54:41 PM	Bubbler valve closed
3/13/2011	2:54:41 PM	Main Vac valve opened
3/13/2011	2:54:41 PM	Bypass valve opened
3/13/2011	2:54:41 PM	Helium MFC set to  0.000000
3/13/2011	2:54:41 PM	H2 MFC set to  0.000000
3/13/2011	2:54:41 PM	BCl3 MFC set to  0.000000
3/13/2011	2:54:41 PM	PHl3 MFC set to  0.000000
3/13/2011	2:54:41 PM	SiCl4 MFC set to  0.000000
3/13/2011	2:54:41 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	2:54:41 PM	Tube furnace set to 0
3/13/2011	2:54:41 PM	Run finished at 2:54 PM
3/13/2011	2:54:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2011	2:56:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/13/2011	2:56:38 PM	Recipe started at 2:56 PM
3/13/2011	2:56:38 PM	Helium valve closed
3/13/2011	2:56:38 PM	H2 valve closed
3/13/2011	2:56:38 PM	BCl3 valve closed
3/13/2011	2:56:38 PM	PH3 valve closed
3/13/2011	2:56:38 PM	SiCl4 pre valve closed
3/13/2011	2:56:38 PM	SiCl4 post valve closed
3/13/2011	2:56:38 PM	Main Vac valve closed
3/13/2011	2:56:38 PM	Bubbler valve closed
3/13/2011	2:56:38 PM	Bypass valve opened
3/13/2011	2:56:38 PM	Helium MFC set to  0.000000
3/13/2011	2:56:38 PM	H2 MFC set to  0.000000
3/13/2011	2:56:38 PM	BCl3 MFC set to  0.000000
3/13/2011	2:56:38 PM	PHl3 MFC set to  0.000000
3/13/2011	2:56:38 PM	SiCl4 MFC set to  0.000000
3/13/2011	2:56:38 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	2:56:38 PM	Tube furnace set to 0
3/13/2011	2:56:39 PM	Helium valve closed
3/13/2011	2:56:39 PM	H2 valve closed
3/13/2011	2:56:39 PM	BCl3 valve closed
3/13/2011	2:56:39 PM	PH3 valve closed
3/13/2011	2:56:39 PM	SiCl4 pre valve closed
3/13/2011	2:56:39 PM	SiCl4 post valve closed
3/13/2011	2:56:39 PM	Bubbler valve closed
3/13/2011	2:56:39 PM	Main Vac valve opened
3/13/2011	2:56:39 PM	Bypass valve opened
3/13/2011	2:56:39 PM	Helium MFC set to  0.000000
3/13/2011	2:56:39 PM	H2 MFC set to  0.000000
3/13/2011	2:56:39 PM	BCl3 MFC set to  0.000000
3/13/2011	2:56:39 PM	PHl3 MFC set to  0.000000
3/13/2011	2:56:39 PM	SiCl4 MFC set to  0.000000
3/13/2011	2:56:39 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	2:56:39 PM	Tube furnace set to 0
3/13/2011	2:57:39 PM	H2 valve closed
3/13/2011	2:57:39 PM	BCl3 valve closed
3/13/2011	2:57:39 PM	PH3 valve closed
3/13/2011	2:57:39 PM	SiCl4 pre valve closed
3/13/2011	2:57:39 PM	SiCl4 post valve closed
3/13/2011	2:57:39 PM	Bubbler valve closed
3/13/2011	2:57:39 PM	Helium valve opened
3/13/2011	2:57:39 PM	Main Vac valve opened
3/13/2011	2:57:39 PM	Bypass valve opened
3/13/2011	2:57:39 PM	Helium MFC set to  100.000000
3/13/2011	2:57:39 PM	H2 MFC set to  0.000000
3/13/2011	2:57:39 PM	BCl3 MFC set to  0.000000
3/13/2011	2:57:39 PM	PHl3 MFC set to  0.000000
3/13/2011	2:57:39 PM	SiCl4 MFC set to  0.000000
3/13/2011	2:57:39 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	2:57:39 PM	Tube furnace set to 0
3/13/2011	2:58:39 PM	Helium valve closed
3/13/2011	2:58:39 PM	H2 valve closed
3/13/2011	2:58:39 PM	BCl3 valve closed
3/13/2011	2:58:39 PM	PH3 valve closed
3/13/2011	2:58:39 PM	SiCl4 pre valve closed
3/13/2011	2:58:39 PM	SiCl4 post valve closed
3/13/2011	2:58:39 PM	Bubbler valve closed
3/13/2011	2:58:39 PM	Main Vac valve opened
3/13/2011	2:58:39 PM	Bypass valve opened
3/13/2011	2:58:39 PM	Helium MFC set to  0.000000
3/13/2011	2:58:39 PM	H2 MFC set to  0.000000
3/13/2011	2:58:39 PM	BCl3 MFC set to  0.000000
3/13/2011	2:58:39 PM	PHl3 MFC set to  0.000000
3/13/2011	2:58:39 PM	SiCl4 MFC set to  0.000000
3/13/2011	2:58:39 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	2:58:39 PM	Tube furnace set to 0
3/13/2011	2:59:39 PM	H2 valve closed
3/13/2011	2:59:39 PM	BCl3 valve closed
3/13/2011	2:59:39 PM	PH3 valve closed
3/13/2011	2:59:39 PM	SiCl4 pre valve closed
3/13/2011	2:59:39 PM	SiCl4 post valve closed
3/13/2011	2:59:39 PM	Bubbler valve closed
3/13/2011	2:59:39 PM	Helium valve opened
3/13/2011	2:59:39 PM	Main Vac valve opened
3/13/2011	2:59:39 PM	Bypass valve opened
3/13/2011	2:59:39 PM	Helium MFC set to  100.000000
3/13/2011	2:59:39 PM	H2 MFC set to  0.000000
3/13/2011	2:59:39 PM	BCl3 MFC set to  0.000000
3/13/2011	2:59:39 PM	PHl3 MFC set to  0.000000
3/13/2011	2:59:39 PM	SiCl4 MFC set to  0.000000
3/13/2011	2:59:39 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	2:59:39 PM	Tube furnace set to 0
3/13/2011	3:00:40 PM	Helium valve closed
3/13/2011	3:00:40 PM	H2 valve closed
3/13/2011	3:00:40 PM	BCl3 valve closed
3/13/2011	3:00:40 PM	PH3 valve closed
3/13/2011	3:00:40 PM	SiCl4 pre valve closed
3/13/2011	3:00:40 PM	SiCl4 post valve closed
3/13/2011	3:00:40 PM	Bubbler valve closed
3/13/2011	3:00:40 PM	Main Vac valve opened
3/13/2011	3:00:40 PM	Bypass valve opened
3/13/2011	3:00:40 PM	Helium MFC set to  0.000000
3/13/2011	3:00:40 PM	H2 MFC set to  0.000000
3/13/2011	3:00:40 PM	BCl3 MFC set to  0.000000
3/13/2011	3:00:40 PM	PHl3 MFC set to  0.000000
3/13/2011	3:00:40 PM	SiCl4 MFC set to  0.000000
3/13/2011	3:00:40 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	3:00:40 PM	Tube furnace set to 0
3/13/2011	3:01:40 PM	H2 valve closed
3/13/2011	3:01:40 PM	BCl3 valve closed
3/13/2011	3:01:40 PM	PH3 valve closed
3/13/2011	3:01:40 PM	SiCl4 pre valve closed
3/13/2011	3:01:40 PM	SiCl4 post valve closed
3/13/2011	3:01:40 PM	Bubbler valve closed
3/13/2011	3:01:40 PM	Helium valve opened
3/13/2011	3:01:40 PM	Main Vac valve opened
3/13/2011	3:01:40 PM	Bypass valve opened
3/13/2011	3:01:40 PM	Helium MFC set to  100.000000
3/13/2011	3:01:40 PM	H2 MFC set to  0.000000
3/13/2011	3:01:40 PM	BCl3 MFC set to  0.000000
3/13/2011	3:01:40 PM	PHl3 MFC set to  0.000000
3/13/2011	3:01:40 PM	SiCl4 MFC set to  0.000000
3/13/2011	3:01:40 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	3:01:40 PM	Tube furnace set to 0
3/13/2011	3:02:40 PM	Helium valve closed
3/13/2011	3:02:40 PM	H2 valve closed
3/13/2011	3:02:40 PM	BCl3 valve closed
3/13/2011	3:02:40 PM	PH3 valve closed
3/13/2011	3:02:40 PM	SiCl4 pre valve closed
3/13/2011	3:02:40 PM	SiCl4 post valve closed
3/13/2011	3:02:40 PM	Bubbler valve closed
3/13/2011	3:02:40 PM	Main Vac valve opened
3/13/2011	3:02:40 PM	Bypass valve opened
3/13/2011	3:02:40 PM	Helium MFC set to  0.000000
3/13/2011	3:02:40 PM	H2 MFC set to  0.000000
3/13/2011	3:02:40 PM	BCl3 MFC set to  0.000000
3/13/2011	3:02:40 PM	PHl3 MFC set to  0.000000
3/13/2011	3:02:40 PM	SiCl4 MFC set to  0.000000
3/13/2011	3:02:40 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	3:02:40 PM	Tube furnace set to 0
3/13/2011	3:03:40 PM	H2 valve closed
3/13/2011	3:03:40 PM	BCl3 valve closed
3/13/2011	3:03:40 PM	PH3 valve closed
3/13/2011	3:03:40 PM	SiCl4 pre valve closed
3/13/2011	3:03:40 PM	SiCl4 post valve closed
3/13/2011	3:03:40 PM	Bubbler valve closed
3/13/2011	3:03:40 PM	Helium valve opened
3/13/2011	3:03:40 PM	Main Vac valve opened
3/13/2011	3:03:40 PM	Bypass valve opened
3/13/2011	3:03:40 PM	Helium MFC set to  100.000000
3/13/2011	3:03:40 PM	H2 MFC set to  0.000000
3/13/2011	3:03:40 PM	BCl3 MFC set to  0.000000
3/13/2011	3:03:40 PM	PHl3 MFC set to  0.000000
3/13/2011	3:03:40 PM	SiCl4 MFC set to  0.000000
3/13/2011	3:03:40 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	3:03:40 PM	Tube furnace set to 0
3/13/2011	3:04:40 PM	Helium valve closed
3/13/2011	3:04:40 PM	H2 valve closed
3/13/2011	3:04:40 PM	BCl3 valve closed
3/13/2011	3:04:40 PM	PH3 valve closed
3/13/2011	3:04:40 PM	SiCl4 pre valve closed
3/13/2011	3:04:40 PM	SiCl4 post valve closed
3/13/2011	3:04:40 PM	Bubbler valve closed
3/13/2011	3:04:40 PM	Main Vac valve opened
3/13/2011	3:04:40 PM	Bypass valve opened
3/13/2011	3:04:40 PM	Helium MFC set to  0.000000
3/13/2011	3:04:40 PM	H2 MFC set to  0.000000
3/13/2011	3:04:40 PM	BCl3 MFC set to  0.000000
3/13/2011	3:04:40 PM	PHl3 MFC set to  0.000000
3/13/2011	3:04:40 PM	SiCl4 MFC set to  0.000000
3/13/2011	3:04:40 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	3:04:40 PM	Tube furnace set to 0
3/13/2011	3:05:41 PM	H2 valve closed
3/13/2011	3:05:41 PM	BCl3 valve closed
3/13/2011	3:05:41 PM	PH3 valve closed
3/13/2011	3:05:41 PM	SiCl4 pre valve closed
3/13/2011	3:05:41 PM	SiCl4 post valve closed
3/13/2011	3:05:41 PM	Bubbler valve closed
3/13/2011	3:05:41 PM	Helium valve opened
3/13/2011	3:05:41 PM	Main Vac valve opened
3/13/2011	3:05:41 PM	Bypass valve opened
3/13/2011	3:05:41 PM	Helium MFC set to  100.000000
3/13/2011	3:05:41 PM	H2 MFC set to  0.000000
3/13/2011	3:05:41 PM	BCl3 MFC set to  0.000000
3/13/2011	3:05:41 PM	PHl3 MFC set to  0.000000
3/13/2011	3:05:41 PM	SiCl4 MFC set to  0.000000
3/13/2011	3:05:41 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	3:05:41 PM	Tube furnace set to 0
3/13/2011	3:06:41 PM	Helium valve closed
3/13/2011	3:06:41 PM	H2 valve closed
3/13/2011	3:06:41 PM	BCl3 valve closed
3/13/2011	3:06:41 PM	PH3 valve closed
3/13/2011	3:06:41 PM	SiCl4 pre valve closed
3/13/2011	3:06:41 PM	SiCl4 post valve closed
3/13/2011	3:06:41 PM	Bubbler valve closed
3/13/2011	3:06:41 PM	Main Vac valve opened
3/13/2011	3:06:41 PM	Bypass valve opened
3/13/2011	3:06:41 PM	Helium MFC set to  0.000000
3/13/2011	3:06:41 PM	H2 MFC set to  0.000000
3/13/2011	3:06:41 PM	BCl3 MFC set to  0.000000
3/13/2011	3:06:41 PM	PHl3 MFC set to  0.000000
3/13/2011	3:06:41 PM	SiCl4 MFC set to  0.000000
3/13/2011	3:06:41 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	3:06:41 PM	Tube furnace set to 0
3/13/2011	3:07:41 PM	H2 valve closed
3/13/2011	3:07:41 PM	BCl3 valve closed
3/13/2011	3:07:41 PM	PH3 valve closed
3/13/2011	3:07:41 PM	SiCl4 pre valve closed
3/13/2011	3:07:41 PM	SiCl4 post valve closed
3/13/2011	3:07:41 PM	Bubbler valve closed
3/13/2011	3:07:41 PM	Helium valve opened
3/13/2011	3:07:41 PM	Main Vac valve opened
3/13/2011	3:07:41 PM	Bypass valve opened
3/13/2011	3:07:41 PM	Helium MFC set to  100.000000
3/13/2011	3:07:41 PM	H2 MFC set to  0.000000
3/13/2011	3:07:41 PM	BCl3 MFC set to  0.000000
3/13/2011	3:07:41 PM	PHl3 MFC set to  0.000000
3/13/2011	3:07:41 PM	SiCl4 MFC set to  0.000000
3/13/2011	3:07:41 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	3:07:41 PM	Tube furnace set to 0
3/13/2011	3:08:41 PM	Helium valve closed
3/13/2011	3:08:41 PM	H2 valve closed
3/13/2011	3:08:41 PM	BCl3 valve closed
3/13/2011	3:08:41 PM	PH3 valve closed
3/13/2011	3:08:41 PM	SiCl4 pre valve closed
3/13/2011	3:08:41 PM	SiCl4 post valve closed
3/13/2011	3:08:41 PM	Bubbler valve closed
3/13/2011	3:08:41 PM	Main Vac valve opened
3/13/2011	3:08:41 PM	Bypass valve opened
3/13/2011	3:08:41 PM	Helium MFC set to  0.000000
3/13/2011	3:08:41 PM	H2 MFC set to  0.000000
3/13/2011	3:08:41 PM	BCl3 MFC set to  0.000000
3/13/2011	3:08:41 PM	PHl3 MFC set to  0.000000
3/13/2011	3:08:41 PM	SiCl4 MFC set to  0.000000
3/13/2011	3:08:41 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	3:08:41 PM	Tube furnace set to 0
3/13/2011	3:09:41 PM	H2 valve closed
3/13/2011	3:09:41 PM	BCl3 valve closed
3/13/2011	3:09:41 PM	PH3 valve closed
3/13/2011	3:09:41 PM	SiCl4 pre valve closed
3/13/2011	3:09:41 PM	SiCl4 post valve closed
3/13/2011	3:09:41 PM	Bubbler valve closed
3/13/2011	3:09:41 PM	Helium valve opened
3/13/2011	3:09:41 PM	Main Vac valve opened
3/13/2011	3:09:41 PM	Bypass valve opened
3/13/2011	3:09:41 PM	Helium MFC set to  100.000000
3/13/2011	3:09:41 PM	H2 MFC set to  0.000000
3/13/2011	3:09:41 PM	BCl3 MFC set to  0.000000
3/13/2011	3:09:41 PM	PHl3 MFC set to  0.000000
3/13/2011	3:09:41 PM	SiCl4 MFC set to  0.000000
3/13/2011	3:09:41 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	3:09:41 PM	Tube furnace set to 0
3/13/2011	3:10:41 PM	Helium valve closed
3/13/2011	3:10:41 PM	H2 valve closed
3/13/2011	3:10:41 PM	BCl3 valve closed
3/13/2011	3:10:41 PM	PH3 valve closed
3/13/2011	3:10:41 PM	SiCl4 pre valve closed
3/13/2011	3:10:41 PM	SiCl4 post valve closed
3/13/2011	3:10:42 PM	Bubbler valve closed
3/13/2011	3:10:42 PM	Main Vac valve opened
3/13/2011	3:10:42 PM	Bypass valve opened
3/13/2011	3:10:42 PM	Helium MFC set to  0.000000
3/13/2011	3:10:42 PM	H2 MFC set to  0.000000
3/13/2011	3:10:42 PM	BCl3 MFC set to  0.000000
3/13/2011	3:10:42 PM	PHl3 MFC set to  0.000000
3/13/2011	3:10:42 PM	SiCl4 MFC set to  0.000000
3/13/2011	3:10:42 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	3:10:42 PM	Tube furnace set to 0
3/13/2011	3:11:42 PM	H2 valve closed
3/13/2011	3:11:42 PM	BCl3 valve closed
3/13/2011	3:11:42 PM	PH3 valve closed
3/13/2011	3:11:42 PM	SiCl4 pre valve closed
3/13/2011	3:11:42 PM	SiCl4 post valve closed
3/13/2011	3:11:42 PM	Bubbler valve closed
3/13/2011	3:11:42 PM	Helium valve opened
3/13/2011	3:11:42 PM	Main Vac valve opened
3/13/2011	3:11:42 PM	Bypass valve opened
3/13/2011	3:11:42 PM	Helium MFC set to  100.000000
3/13/2011	3:11:42 PM	H2 MFC set to  0.000000
3/13/2011	3:11:42 PM	BCl3 MFC set to  0.000000
3/13/2011	3:11:42 PM	PHl3 MFC set to  0.000000
3/13/2011	3:11:42 PM	SiCl4 MFC set to  0.000000
3/13/2011	3:11:42 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	3:11:42 PM	Tube furnace set to 0
3/13/2011	3:12:42 PM	Helium valve closed
3/13/2011	3:12:42 PM	H2 valve closed
3/13/2011	3:12:42 PM	BCl3 valve closed
3/13/2011	3:12:42 PM	PH3 valve closed
3/13/2011	3:12:42 PM	SiCl4 pre valve closed
3/13/2011	3:12:42 PM	SiCl4 post valve closed
3/13/2011	3:12:42 PM	Bubbler valve closed
3/13/2011	3:12:42 PM	Main Vac valve opened
3/13/2011	3:12:42 PM	Bypass valve opened
3/13/2011	3:12:42 PM	Helium MFC set to  0.000000
3/13/2011	3:12:42 PM	H2 MFC set to  0.000000
3/13/2011	3:12:42 PM	BCl3 MFC set to  0.000000
3/13/2011	3:12:42 PM	PHl3 MFC set to  0.000000
3/13/2011	3:12:42 PM	SiCl4 MFC set to  0.000000
3/13/2011	3:12:42 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	3:12:42 PM	Tube furnace set to 0
3/13/2011	3:13:42 PM	H2 valve closed
3/13/2011	3:13:42 PM	BCl3 valve closed
3/13/2011	3:13:42 PM	PH3 valve closed
3/13/2011	3:13:42 PM	SiCl4 pre valve closed
3/13/2011	3:13:42 PM	SiCl4 post valve closed
3/13/2011	3:13:42 PM	Bubbler valve closed
3/13/2011	3:13:42 PM	Helium valve opened
3/13/2011	3:13:42 PM	Main Vac valve opened
3/13/2011	3:13:42 PM	Bypass valve opened
3/13/2011	3:13:42 PM	Helium MFC set to  100.000000
3/13/2011	3:13:42 PM	H2 MFC set to  0.000000
3/13/2011	3:13:42 PM	BCl3 MFC set to  0.000000
3/13/2011	3:13:42 PM	PHl3 MFC set to  0.000000
3/13/2011	3:13:42 PM	SiCl4 MFC set to  0.000000
3/13/2011	3:13:42 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	3:13:42 PM	Tube furnace set to 0
3/13/2011	3:14:42 PM	Helium valve closed
3/13/2011	3:14:42 PM	H2 valve closed
3/13/2011	3:14:42 PM	BCl3 valve closed
3/13/2011	3:14:42 PM	PH3 valve closed
3/13/2011	3:14:42 PM	SiCl4 pre valve closed
3/13/2011	3:14:42 PM	SiCl4 post valve closed
3/13/2011	3:14:42 PM	Bubbler valve closed
3/13/2011	3:14:42 PM	Main Vac valve opened
3/13/2011	3:14:42 PM	Bypass valve opened
3/13/2011	3:14:42 PM	Helium MFC set to  0.000000
3/13/2011	3:14:42 PM	H2 MFC set to  0.000000
3/13/2011	3:14:42 PM	BCl3 MFC set to  0.000000
3/13/2011	3:14:42 PM	PHl3 MFC set to  0.000000
3/13/2011	3:14:42 PM	SiCl4 MFC set to  0.000000
3/13/2011	3:14:42 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	3:14:42 PM	Tube furnace set to 0
3/13/2011	3:15:42 PM	H2 valve closed
3/13/2011	3:15:42 PM	BCl3 valve closed
3/13/2011	3:15:42 PM	PH3 valve closed
3/13/2011	3:15:42 PM	SiCl4 pre valve closed
3/13/2011	3:15:42 PM	SiCl4 post valve closed
3/13/2011	3:15:42 PM	Bubbler valve closed
3/13/2011	3:15:42 PM	Helium valve opened
3/13/2011	3:15:42 PM	Main Vac valve opened
3/13/2011	3:15:42 PM	Bypass valve opened
3/13/2011	3:15:42 PM	Helium MFC set to  100.000000
3/13/2011	3:15:42 PM	H2 MFC set to  0.000000
3/13/2011	3:15:42 PM	BCl3 MFC set to  0.000000
3/13/2011	3:15:42 PM	PHl3 MFC set to  0.000000
3/13/2011	3:15:43 PM	SiCl4 MFC set to  0.000000
3/13/2011	3:15:43 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	3:15:43 PM	Tube furnace set to 0
3/13/2011	3:16:43 PM	Helium valve closed
3/13/2011	3:16:43 PM	H2 valve closed
3/13/2011	3:16:43 PM	BCl3 valve closed
3/13/2011	3:16:43 PM	PH3 valve closed
3/13/2011	3:16:43 PM	SiCl4 pre valve closed
3/13/2011	3:16:43 PM	SiCl4 post valve closed
3/13/2011	3:16:43 PM	Bubbler valve closed
3/13/2011	3:16:43 PM	Main Vac valve opened
3/13/2011	3:16:43 PM	Bypass valve opened
3/13/2011	3:16:43 PM	Helium MFC set to  0.000000
3/13/2011	3:16:43 PM	H2 MFC set to  0.000000
3/13/2011	3:16:43 PM	BCl3 MFC set to  0.000000
3/13/2011	3:16:43 PM	PHl3 MFC set to  0.000000
3/13/2011	3:16:43 PM	SiCl4 MFC set to  0.000000
3/13/2011	3:16:43 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	3:16:43 PM	Tube furnace set to 0
3/13/2011	3:16:44 PM	Run finished at 3:16 PM
3/13/2011	3:16:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/13/2011	3:17:22 PM	Helium MFC set to  0.000000
3/13/2011	3:17:49 PM	Helium MFC set to  100.000000
3/13/2011	3:17:49 PM	Helium valve opened
3/13/2011	3:20:02 PM	Helium MFC set to  0.000000
3/13/2011	3:20:03 PM	Helium valve closed
3/13/2011	3:21:00 PM	Recipe started at 3:20 PM
3/13/2011	3:21:00 PM	Helium valve closed
3/13/2011	3:21:00 PM	BCl3 valve closed
3/13/2011	3:21:00 PM	PH3 valve closed
3/13/2011	3:21:00 PM	SiCl4 pre valve closed
3/13/2011	3:21:00 PM	SiCl4 post valve closed
3/13/2011	3:21:00 PM	Main Vac valve closed
3/13/2011	3:21:00 PM	Bypass valve closed
3/13/2011	3:21:00 PM	Bubbler valve closed
3/13/2011	3:21:00 PM	H2 valve opened
3/13/2011	3:21:00 PM	Helium MFC set to  0.000000
3/13/2011	3:21:00 PM	H2 MFC set to  500.000000
3/13/2011	3:21:00 PM	BCl3 MFC set to  0.000000
3/13/2011	3:21:00 PM	PHl3 MFC set to  0.000000
3/13/2011	3:21:00 PM	SiCl4 MFC set to  0.000000
3/13/2011	3:21:00 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	3:21:00 PM	Tube furnace set to 0
3/13/2011	3:22:21 PM	Helium valve closed
3/13/2011	3:22:21 PM	BCl3 valve closed
3/13/2011	3:22:21 PM	PH3 valve closed
3/13/2011	3:22:21 PM	SiCl4 pre valve closed
3/13/2011	3:22:21 PM	SiCl4 post valve closed
3/13/2011	3:22:21 PM	Main Vac valve closed
3/13/2011	3:22:21 PM	Bypass valve closed
3/13/2011	3:22:21 PM	H2 valve opened
3/13/2011	3:22:21 PM	Bubbler valve opened
3/13/2011	3:22:21 PM	Helium MFC set to  0.000000
3/13/2011	3:22:21 PM	H2 MFC set to  500.000000
3/13/2011	3:22:21 PM	BCl3 MFC set to  0.000000
3/13/2011	3:22:21 PM	PHl3 MFC set to  0.000000
3/13/2011	3:22:21 PM	SiCl4 MFC set to  0.000000
3/13/2011	3:22:21 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	3:22:21 PM	Tube furnace set to 1000
3/13/2011	3:42:21 PM	Helium valve closed
3/13/2011	3:42:21 PM	PH3 valve closed
3/13/2011	3:42:21 PM	Main Vac valve closed
3/13/2011	3:42:21 PM	Bypass valve closed
3/13/2011	3:42:21 PM	H2 valve opened
3/13/2011	3:42:21 PM	BCl3 valve opened
3/13/2011	3:42:21 PM	SiCl4 pre valve opened
3/13/2011	3:42:21 PM	SiCl4 post valve opened
3/13/2011	3:42:21 PM	Bubbler valve opened
3/13/2011	3:42:21 PM	Helium MFC set to  0.000000
3/13/2011	3:42:21 PM	H2 MFC set to  500.000000
3/13/2011	3:42:21 PM	BCl3 MFC set to  2.500000
3/13/2011	3:42:21 PM	PHl3 MFC set to  0.000000
3/13/2011	3:42:21 PM	SiCl4 MFC set to  80.000000
3/13/2011	3:42:21 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	3:42:21 PM	Tube furnace set to 1000
3/13/2011	4:01:51 PM	Helium valve closed
3/13/2011	4:01:51 PM	PH3 valve closed
3/13/2011	4:01:51 PM	Main Vac valve closed
3/13/2011	4:01:51 PM	Bypass valve closed
3/13/2011	4:01:51 PM	H2 valve opened
3/13/2011	4:01:51 PM	BCl3 valve opened
3/13/2011	4:01:51 PM	SiCl4 pre valve opened
3/13/2011	4:01:51 PM	SiCl4 post valve opened
3/13/2011	4:01:51 PM	Bubbler valve opened
3/13/2011	4:01:51 PM	Helium MFC set to  0.000000
3/13/2011	4:01:51 PM	H2 MFC set to  500.000000
3/13/2011	4:01:51 PM	BCl3 MFC set to  6.000000
3/13/2011	4:01:51 PM	PHl3 MFC set to  0.000000
3/13/2011	4:01:51 PM	SiCl4 MFC set to  80.000000
3/13/2011	4:01:51 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	4:01:51 PM	Tube furnace set to 1000
3/13/2011	4:02:21 PM	H2 valve closed
3/13/2011	4:02:21 PM	BCl3 valve closed
3/13/2011	4:02:21 PM	PH3 valve closed
3/13/2011	4:02:21 PM	SiCl4 pre valve closed
3/13/2011	4:02:21 PM	SiCl4 post valve closed
3/13/2011	4:02:21 PM	Main Vac valve closed
3/13/2011	4:02:21 PM	Bypass valve closed
3/13/2011	4:02:21 PM	Helium valve opened
3/13/2011	4:02:21 PM	Bubbler valve opened
3/13/2011	4:02:21 PM	Helium MFC set to  500.000000
3/13/2011	4:02:21 PM	H2 MFC set to  0.000000
3/13/2011	4:02:21 PM	BCl3 MFC set to  0.000000
3/13/2011	4:02:21 PM	PHl3 MFC set to  0.000000
3/13/2011	4:02:21 PM	SiCl4 MFC set to  0.000000
3/13/2011	4:02:21 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	4:02:22 PM	Tube furnace set to 0
3/13/2011	4:22:22 PM	Helium valve closed
3/13/2011	4:22:22 PM	H2 valve closed
3/13/2011	4:22:22 PM	BCl3 valve closed
3/13/2011	4:22:22 PM	PH3 valve closed
3/13/2011	4:22:22 PM	SiCl4 pre valve closed
3/13/2011	4:22:22 PM	SiCl4 post valve closed
3/13/2011	4:22:22 PM	Main Vac valve closed
3/13/2011	4:22:22 PM	Bypass valve closed
3/13/2011	4:22:22 PM	Bubbler valve closed
3/13/2011	4:22:22 PM	Helium MFC set to  0.000000
3/13/2011	4:22:22 PM	H2 MFC set to  0.000000
3/13/2011	4:22:22 PM	BCl3 MFC set to  0.000000
3/13/2011	4:22:22 PM	PHl3 MFC set to  0.000000
3/13/2011	4:22:22 PM	SiCl4 MFC set to  0.000000
3/13/2011	4:22:22 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	4:22:22 PM	Tube furnace set to 0
3/13/2011	4:22:22 PM	Run finished at 4:22 PM
3/13/2011	4:54:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2011	4:54:00 PM	Recipe started at 4:54 PM
3/13/2011	4:54:00 PM	H2 valve closed
3/13/2011	4:54:00 PM	BCl3 valve closed
3/13/2011	4:54:00 PM	PH3 valve closed
3/13/2011	4:54:00 PM	SiCl4 pre valve closed
3/13/2011	4:54:00 PM	SiCl4 post valve closed
3/13/2011	4:54:00 PM	Main Vac valve closed
3/13/2011	4:54:00 PM	Bypass valve closed
3/13/2011	4:54:00 PM	Bubbler valve closed
3/13/2011	4:54:00 PM	Helium valve opened
3/13/2011	4:54:00 PM	Helium MFC set to  500.000000
3/13/2011	4:54:00 PM	H2 MFC set to  0.000000
3/13/2011	4:54:00 PM	BCl3 MFC set to  0.000000
3/13/2011	4:54:00 PM	PHl3 MFC set to  0.000000
3/13/2011	4:54:00 PM	SiCl4 MFC set to  0.000000
3/13/2011	4:54:00 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	4:54:01 PM	Tube furnace set to 0
3/13/2011	4:54:07 PM	Helium valve closed
3/13/2011	4:54:07 PM	H2 valve closed
3/13/2011	4:54:07 PM	BCl3 valve closed
3/13/2011	4:54:07 PM	PH3 valve closed
3/13/2011	4:54:07 PM	SiCl4 pre valve closed
3/13/2011	4:54:07 PM	SiCl4 post valve closed
3/13/2011	4:54:07 PM	Main Vac valve closed
3/13/2011	4:54:07 PM	Bypass valve closed
3/13/2011	4:54:07 PM	Bubbler valve closed
3/13/2011	4:54:07 PM	Helium MFC set to  0.000000
3/13/2011	4:54:07 PM	H2 MFC set to  0.000000
3/13/2011	4:54:07 PM	BCl3 MFC set to  0.000000
3/13/2011	4:54:07 PM	PHl3 MFC set to  0.000000
3/13/2011	4:54:07 PM	SiCl4 MFC set to  0.000000
3/13/2011	4:54:07 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	4:54:07 PM	Tube furnace set to 0
3/13/2011	4:54:07 PM	Run finished at 4:54 PM
3/13/2011	4:54:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2011	4:56:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2011	4:56:34 PM	Recipe started at 4:56 PM
3/13/2011	4:56:34 PM	Helium valve closed
3/13/2011	4:56:34 PM	H2 valve closed
3/13/2011	4:56:34 PM	BCl3 valve closed
3/13/2011	4:56:34 PM	PH3 valve closed
3/13/2011	4:56:34 PM	SiCl4 pre valve closed
3/13/2011	4:56:34 PM	SiCl4 post valve closed
3/13/2011	4:56:34 PM	Main Vac valve closed
3/13/2011	4:56:34 PM	Bubbler valve closed
3/13/2011	4:56:34 PM	Bypass valve opened
3/13/2011	4:56:34 PM	Helium MFC set to  0.000000
3/13/2011	4:56:34 PM	H2 MFC set to  0.000000
3/13/2011	4:56:34 PM	BCl3 MFC set to  0.000000
3/13/2011	4:56:34 PM	PHl3 MFC set to  0.000000
3/13/2011	4:56:34 PM	SiCl4 MFC set to  0.000000
3/13/2011	4:56:34 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	4:56:34 PM	Tube furnace set to 0
3/13/2011	4:57:05 PM	Helium valve closed
3/13/2011	4:57:05 PM	H2 valve closed
3/13/2011	4:57:05 PM	BCl3 valve closed
3/13/2011	4:57:05 PM	PH3 valve closed
3/13/2011	4:57:05 PM	SiCl4 pre valve closed
3/13/2011	4:57:05 PM	SiCl4 post valve closed
3/13/2011	4:57:05 PM	Bubbler valve closed
3/13/2011	4:57:05 PM	Main Vac valve opened
3/13/2011	4:57:05 PM	Bypass valve opened
3/13/2011	4:57:05 PM	Helium MFC set to  0.000000
3/13/2011	4:57:05 PM	H2 MFC set to  0.000000
3/13/2011	4:57:05 PM	BCl3 MFC set to  0.000000
3/13/2011	4:57:05 PM	PHl3 MFC set to  0.000000
3/13/2011	4:57:05 PM	SiCl4 MFC set to  0.000000
3/13/2011	4:57:05 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	4:57:05 PM	Tube furnace set to 0
3/13/2011	4:57:06 PM	Run finished at 4:57 PM
3/13/2011	4:57:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2011	6:11:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2011	6:11:26 PM	Recipe started at 6:11 PM
3/13/2011	6:11:26 PM	H2 valve closed
3/13/2011	6:11:26 PM	BCl3 valve closed
3/13/2011	6:11:26 PM	PH3 valve closed
3/13/2011	6:11:26 PM	SiCl4 pre valve closed
3/13/2011	6:11:26 PM	SiCl4 post valve closed
3/13/2011	6:11:26 PM	Main Vac valve closed
3/13/2011	6:11:26 PM	Bypass valve closed
3/13/2011	6:11:26 PM	Bubbler valve closed
3/13/2011	6:11:26 PM	Helium valve opened
3/13/2011	6:11:26 PM	Helium MFC set to  500.000000
3/13/2011	6:11:26 PM	H2 MFC set to  0.000000
3/13/2011	6:11:26 PM	BCl3 MFC set to  0.000000
3/13/2011	6:11:26 PM	PHl3 MFC set to  0.000000
3/13/2011	6:11:26 PM	SiCl4 MFC set to  0.000000
3/13/2011	6:11:26 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	6:11:26 PM	Tube furnace set to 0
3/13/2011	6:12:46 PM	Helium valve closed
3/13/2011	6:12:46 PM	H2 valve closed
3/13/2011	6:12:46 PM	BCl3 valve closed
3/13/2011	6:12:46 PM	PH3 valve closed
3/13/2011	6:12:46 PM	SiCl4 pre valve closed
3/13/2011	6:12:46 PM	SiCl4 post valve closed
3/13/2011	6:12:46 PM	Main Vac valve closed
3/13/2011	6:12:46 PM	Bypass valve closed
3/13/2011	6:12:46 PM	Bubbler valve closed
3/13/2011	6:12:46 PM	Helium MFC set to  0.000000
3/13/2011	6:12:46 PM	H2 MFC set to  0.000000
3/13/2011	6:12:46 PM	BCl3 MFC set to  0.000000
3/13/2011	6:12:46 PM	PHl3 MFC set to  0.000000
3/13/2011	6:12:46 PM	SiCl4 MFC set to  0.000000
3/13/2011	6:12:46 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	6:12:46 PM	Tube furnace set to 0
3/13/2011	6:12:46 PM	Run finished at 6:12 PM
3/13/2011	6:12:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2011	6:22:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/13/2011	6:22:48 PM	Recipe started at 6:22 PM
3/13/2011	6:22:48 PM	Helium valve closed
3/13/2011	6:22:48 PM	H2 valve closed
3/13/2011	6:22:48 PM	BCl3 valve closed
3/13/2011	6:22:48 PM	PH3 valve closed
3/13/2011	6:22:48 PM	SiCl4 pre valve closed
3/13/2011	6:22:48 PM	SiCl4 post valve closed
3/13/2011	6:22:48 PM	Main Vac valve closed
3/13/2011	6:22:48 PM	Bubbler valve closed
3/13/2011	6:22:48 PM	Bypass valve opened
3/13/2011	6:22:48 PM	Helium MFC set to  0.000000
3/13/2011	6:22:48 PM	H2 MFC set to  0.000000
3/13/2011	6:22:48 PM	BCl3 MFC set to  0.000000
3/13/2011	6:22:48 PM	PHl3 MFC set to  0.000000
3/13/2011	6:22:48 PM	SiCl4 MFC set to  0.000000
3/13/2011	6:22:48 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	6:22:48 PM	Tube furnace set to 0
3/13/2011	6:23:09 PM	Helium valve closed
3/13/2011	6:23:09 PM	H2 valve closed
3/13/2011	6:23:09 PM	BCl3 valve closed
3/13/2011	6:23:09 PM	PH3 valve closed
3/13/2011	6:23:09 PM	SiCl4 pre valve closed
3/13/2011	6:23:09 PM	SiCl4 post valve closed
3/13/2011	6:23:09 PM	Bubbler valve closed
3/13/2011	6:23:09 PM	Main Vac valve opened
3/13/2011	6:23:09 PM	Bypass valve opened
3/13/2011	6:23:09 PM	Helium MFC set to  0.000000
3/13/2011	6:23:09 PM	H2 MFC set to  0.000000
3/13/2011	6:23:09 PM	BCl3 MFC set to  0.000000
3/13/2011	6:23:09 PM	PHl3 MFC set to  0.000000
3/13/2011	6:23:09 PM	SiCl4 MFC set to  0.000000
3/13/2011	6:23:09 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	6:23:09 PM	Tube furnace set to 0
3/13/2011	6:23:50 PM	H2 valve closed
3/13/2011	6:23:50 PM	BCl3 valve closed
3/13/2011	6:23:50 PM	PH3 valve closed
3/13/2011	6:23:50 PM	SiCl4 pre valve closed
3/13/2011	6:23:50 PM	SiCl4 post valve closed
3/13/2011	6:23:50 PM	Bubbler valve closed
3/13/2011	6:23:50 PM	Helium valve opened
3/13/2011	6:23:50 PM	Main Vac valve opened
3/13/2011	6:23:50 PM	Bypass valve opened
3/13/2011	6:23:50 PM	Helium MFC set to  100.000000
3/13/2011	6:23:50 PM	H2 MFC set to  0.000000
3/13/2011	6:23:50 PM	BCl3 MFC set to  0.000000
3/13/2011	6:23:50 PM	PHl3 MFC set to  0.000000
3/13/2011	6:23:50 PM	SiCl4 MFC set to  0.000000
3/13/2011	6:23:50 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	6:23:50 PM	Tube furnace set to 0
3/13/2011	6:24:40 PM	Helium valve closed
3/13/2011	6:24:40 PM	H2 valve closed
3/13/2011	6:24:40 PM	BCl3 valve closed
3/13/2011	6:24:40 PM	PH3 valve closed
3/13/2011	6:24:40 PM	SiCl4 pre valve closed
3/13/2011	6:24:40 PM	SiCl4 post valve closed
3/13/2011	6:24:40 PM	Bubbler valve closed
3/13/2011	6:24:40 PM	Main Vac valve opened
3/13/2011	6:24:40 PM	Bypass valve opened
3/13/2011	6:24:40 PM	Helium MFC set to  0.000000
3/13/2011	6:24:40 PM	H2 MFC set to  0.000000
3/13/2011	6:24:40 PM	BCl3 MFC set to  0.000000
3/13/2011	6:24:40 PM	PHl3 MFC set to  0.000000
3/13/2011	6:24:40 PM	SiCl4 MFC set to  0.000000
3/13/2011	6:24:40 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	6:24:40 PM	Tube furnace set to 0
3/13/2011	6:25:20 PM	Run aborted at 6:25 PM
3/13/2011	6:25:20 PM	Helium valve closed
3/13/2011	6:25:20 PM	H2 valve closed
3/13/2011	6:25:20 PM	BCl3 valve closed
3/13/2011	6:25:20 PM	PH3 valve closed
3/13/2011	6:25:20 PM	SiCl4 pre valve closed
3/13/2011	6:25:20 PM	SiCl4 post valve closed
3/13/2011	6:25:20 PM	Bypass valve closed
3/13/2011	6:25:20 PM	Main Vac valve closed
3/13/2011	6:25:20 PM	Bubbler valve closed
3/13/2011	6:25:20 PM	Helium MFC set to  0.000000
3/13/2011	6:25:20 PM	H2 MFC set to  0.000000
3/13/2011	6:25:20 PM	BCl3 MFC set to  0.000000
3/13/2011	6:25:20 PM	PHl3 MFC set to  0.000000
3/13/2011	6:25:20 PM	SiCl4 MFC set to  0.000000
3/13/2011	6:25:21 PM	Tube furnace set to 0
3/13/2011	6:25:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/13/2011	6:25:28 PM	Tube furnace set to 800
3/13/2011	6:28:40 PM	Recipe started at 6:28 PM
3/13/2011	6:28:41 PM	Helium valve closed
3/13/2011	6:28:41 PM	H2 valve closed
3/13/2011	6:28:41 PM	BCl3 valve closed
3/13/2011	6:28:41 PM	PH3 valve closed
3/13/2011	6:28:41 PM	SiCl4 pre valve closed
3/13/2011	6:28:41 PM	SiCl4 post valve closed
3/13/2011	6:28:41 PM	Main Vac valve closed
3/13/2011	6:28:41 PM	Bubbler valve closed
3/13/2011	6:28:41 PM	Bypass valve opened
3/13/2011	6:28:41 PM	Helium MFC set to  0.000000
3/13/2011	6:28:41 PM	H2 MFC set to  0.000000
3/13/2011	6:28:41 PM	BCl3 MFC set to  0.000000
3/13/2011	6:28:41 PM	PHl3 MFC set to  0.000000
3/13/2011	6:28:41 PM	SiCl4 MFC set to  0.000000
3/13/2011	6:28:41 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	6:28:41 PM	Tube furnace set to 800
3/13/2011	6:28:41 PM	Helium valve closed
3/13/2011	6:28:41 PM	H2 valve closed
3/13/2011	6:28:41 PM	BCl3 valve closed
3/13/2011	6:28:41 PM	PH3 valve closed
3/13/2011	6:28:41 PM	SiCl4 pre valve closed
3/13/2011	6:28:41 PM	SiCl4 post valve closed
3/13/2011	6:28:41 PM	Bubbler valve closed
3/13/2011	6:28:41 PM	Main Vac valve opened
3/13/2011	6:28:41 PM	Bypass valve opened
3/13/2011	6:28:41 PM	Helium MFC set to  0.000000
3/13/2011	6:28:41 PM	H2 MFC set to  0.000000
3/13/2011	6:28:41 PM	BCl3 MFC set to  0.000000
3/13/2011	6:28:41 PM	PHl3 MFC set to  0.000000
3/13/2011	6:28:41 PM	SiCl4 MFC set to  0.000000
3/13/2011	6:28:41 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	6:28:41 PM	Tube furnace set to 800
3/13/2011	6:29:41 PM	H2 valve closed
3/13/2011	6:29:41 PM	BCl3 valve closed
3/13/2011	6:29:41 PM	PH3 valve closed
3/13/2011	6:29:41 PM	SiCl4 pre valve closed
3/13/2011	6:29:41 PM	SiCl4 post valve closed
3/13/2011	6:29:41 PM	Bubbler valve closed
3/13/2011	6:29:41 PM	Helium valve opened
3/13/2011	6:29:41 PM	Main Vac valve opened
3/13/2011	6:29:41 PM	Bypass valve opened
3/13/2011	6:29:41 PM	Helium MFC set to  50.000000
3/13/2011	6:29:41 PM	H2 MFC set to  0.000000
3/13/2011	6:29:41 PM	BCl3 MFC set to  0.000000
3/13/2011	6:29:41 PM	PHl3 MFC set to  0.000000
3/13/2011	6:29:41 PM	SiCl4 MFC set to  0.000000
3/13/2011	6:29:41 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	6:29:41 PM	Tube furnace set to 800
3/13/2011	6:30:41 PM	Helium valve closed
3/13/2011	6:30:41 PM	H2 valve closed
3/13/2011	6:30:41 PM	BCl3 valve closed
3/13/2011	6:30:41 PM	PH3 valve closed
3/13/2011	6:30:41 PM	SiCl4 pre valve closed
3/13/2011	6:30:41 PM	SiCl4 post valve closed
3/13/2011	6:30:41 PM	Bubbler valve closed
3/13/2011	6:30:41 PM	Main Vac valve opened
3/13/2011	6:30:41 PM	Bypass valve opened
3/13/2011	6:30:41 PM	Helium MFC set to  0.000000
3/13/2011	6:30:41 PM	H2 MFC set to  0.000000
3/13/2011	6:30:41 PM	BCl3 MFC set to  0.000000
3/13/2011	6:30:41 PM	PHl3 MFC set to  0.000000
3/13/2011	6:30:41 PM	SiCl4 MFC set to  0.000000
3/13/2011	6:30:41 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	6:30:42 PM	Tube furnace set to 800
3/13/2011	6:31:42 PM	H2 valve closed
3/13/2011	6:31:42 PM	BCl3 valve closed
3/13/2011	6:31:42 PM	PH3 valve closed
3/13/2011	6:31:42 PM	SiCl4 pre valve closed
3/13/2011	6:31:42 PM	SiCl4 post valve closed
3/13/2011	6:31:42 PM	Bubbler valve closed
3/13/2011	6:31:42 PM	Helium valve opened
3/13/2011	6:31:42 PM	Main Vac valve opened
3/13/2011	6:31:42 PM	Bypass valve opened
3/13/2011	6:31:42 PM	Helium MFC set to  100.000000
3/13/2011	6:31:42 PM	H2 MFC set to  0.000000
3/13/2011	6:31:42 PM	BCl3 MFC set to  0.000000
3/13/2011	6:31:42 PM	PHl3 MFC set to  0.000000
3/13/2011	6:31:42 PM	SiCl4 MFC set to  0.000000
3/13/2011	6:31:42 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	6:31:42 PM	Tube furnace set to 800
3/13/2011	6:32:42 PM	Helium valve closed
3/13/2011	6:32:42 PM	H2 valve closed
3/13/2011	6:32:42 PM	BCl3 valve closed
3/13/2011	6:32:42 PM	PH3 valve closed
3/13/2011	6:32:42 PM	SiCl4 pre valve closed
3/13/2011	6:32:42 PM	SiCl4 post valve closed
3/13/2011	6:32:42 PM	Bubbler valve closed
3/13/2011	6:32:42 PM	Main Vac valve opened
3/13/2011	6:32:42 PM	Bypass valve opened
3/13/2011	6:32:42 PM	Helium MFC set to  0.000000
3/13/2011	6:32:42 PM	H2 MFC set to  0.000000
3/13/2011	6:32:42 PM	BCl3 MFC set to  0.000000
3/13/2011	6:32:42 PM	PHl3 MFC set to  0.000000
3/13/2011	6:32:42 PM	SiCl4 MFC set to  0.000000
3/13/2011	6:32:42 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	6:32:42 PM	Tube furnace set to 800
3/13/2011	6:33:42 PM	H2 valve closed
3/13/2011	6:33:42 PM	BCl3 valve closed
3/13/2011	6:33:42 PM	PH3 valve closed
3/13/2011	6:33:42 PM	SiCl4 pre valve closed
3/13/2011	6:33:42 PM	SiCl4 post valve closed
3/13/2011	6:33:42 PM	Bubbler valve closed
3/13/2011	6:33:42 PM	Helium valve opened
3/13/2011	6:33:42 PM	Main Vac valve opened
3/13/2011	6:33:42 PM	Bypass valve opened
3/13/2011	6:33:42 PM	Helium MFC set to  100.000000
3/13/2011	6:33:42 PM	H2 MFC set to  0.000000
3/13/2011	6:33:42 PM	BCl3 MFC set to  0.000000
3/13/2011	6:33:42 PM	PHl3 MFC set to  0.000000
3/13/2011	6:33:42 PM	SiCl4 MFC set to  0.000000
3/13/2011	6:33:42 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	6:33:42 PM	Tube furnace set to 800
3/13/2011	6:34:42 PM	Helium valve closed
3/13/2011	6:34:42 PM	H2 valve closed
3/13/2011	6:34:42 PM	BCl3 valve closed
3/13/2011	6:34:42 PM	PH3 valve closed
3/13/2011	6:34:42 PM	SiCl4 pre valve closed
3/13/2011	6:34:42 PM	SiCl4 post valve closed
3/13/2011	6:34:42 PM	Bubbler valve closed
3/13/2011	6:34:42 PM	Main Vac valve opened
3/13/2011	6:34:42 PM	Bypass valve opened
3/13/2011	6:34:42 PM	Helium MFC set to  0.000000
3/13/2011	6:34:42 PM	H2 MFC set to  0.000000
3/13/2011	6:34:42 PM	BCl3 MFC set to  0.000000
3/13/2011	6:34:42 PM	PHl3 MFC set to  0.000000
3/13/2011	6:34:42 PM	SiCl4 MFC set to  0.000000
3/13/2011	6:34:42 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	6:34:42 PM	Tube furnace set to 800
3/13/2011	6:35:42 PM	H2 valve closed
3/13/2011	6:35:42 PM	BCl3 valve closed
3/13/2011	6:35:42 PM	PH3 valve closed
3/13/2011	6:35:42 PM	SiCl4 pre valve closed
3/13/2011	6:35:42 PM	SiCl4 post valve closed
3/13/2011	6:35:42 PM	Bubbler valve closed
3/13/2011	6:35:42 PM	Helium valve opened
3/13/2011	6:35:42 PM	Main Vac valve opened
3/13/2011	6:35:42 PM	Bypass valve opened
3/13/2011	6:35:42 PM	Helium MFC set to  100.000000
3/13/2011	6:35:42 PM	H2 MFC set to  0.000000
3/13/2011	6:35:42 PM	BCl3 MFC set to  0.000000
3/13/2011	6:35:42 PM	PHl3 MFC set to  0.000000
3/13/2011	6:35:42 PM	SiCl4 MFC set to  0.000000
3/13/2011	6:35:42 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	6:35:43 PM	Tube furnace set to 800
3/13/2011	6:36:43 PM	Helium valve closed
3/13/2011	6:36:43 PM	H2 valve closed
3/13/2011	6:36:43 PM	BCl3 valve closed
3/13/2011	6:36:43 PM	PH3 valve closed
3/13/2011	6:36:43 PM	SiCl4 pre valve closed
3/13/2011	6:36:43 PM	SiCl4 post valve closed
3/13/2011	6:36:43 PM	Bubbler valve closed
3/13/2011	6:36:43 PM	Main Vac valve opened
3/13/2011	6:36:43 PM	Bypass valve opened
3/13/2011	6:36:43 PM	Helium MFC set to  0.000000
3/13/2011	6:36:43 PM	H2 MFC set to  0.000000
3/13/2011	6:36:43 PM	BCl3 MFC set to  0.000000
3/13/2011	6:36:43 PM	PHl3 MFC set to  0.000000
3/13/2011	6:36:43 PM	SiCl4 MFC set to  0.000000
3/13/2011	6:36:43 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	6:36:43 PM	Tube furnace set to 800
3/13/2011	6:37:43 PM	H2 valve closed
3/13/2011	6:37:43 PM	BCl3 valve closed
3/13/2011	6:37:43 PM	PH3 valve closed
3/13/2011	6:37:43 PM	SiCl4 pre valve closed
3/13/2011	6:37:43 PM	SiCl4 post valve closed
3/13/2011	6:37:43 PM	Bubbler valve closed
3/13/2011	6:37:43 PM	Helium valve opened
3/13/2011	6:37:43 PM	Main Vac valve opened
3/13/2011	6:37:43 PM	Bypass valve opened
3/13/2011	6:37:43 PM	Helium MFC set to  100.000000
3/13/2011	6:37:43 PM	H2 MFC set to  0.000000
3/13/2011	6:37:43 PM	BCl3 MFC set to  0.000000
3/13/2011	6:37:43 PM	PHl3 MFC set to  0.000000
3/13/2011	6:37:43 PM	SiCl4 MFC set to  0.000000
3/13/2011	6:37:43 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	6:37:43 PM	Tube furnace set to 800
3/13/2011	6:38:43 PM	Helium valve closed
3/13/2011	6:38:43 PM	H2 valve closed
3/13/2011	6:38:43 PM	BCl3 valve closed
3/13/2011	6:38:43 PM	PH3 valve closed
3/13/2011	6:38:43 PM	SiCl4 pre valve closed
3/13/2011	6:38:43 PM	SiCl4 post valve closed
3/13/2011	6:38:43 PM	Bubbler valve closed
3/13/2011	6:38:43 PM	Main Vac valve opened
3/13/2011	6:38:43 PM	Bypass valve opened
3/13/2011	6:38:43 PM	Helium MFC set to  0.000000
3/13/2011	6:38:43 PM	H2 MFC set to  0.000000
3/13/2011	6:38:43 PM	BCl3 MFC set to  0.000000
3/13/2011	6:38:43 PM	PHl3 MFC set to  0.000000
3/13/2011	6:38:43 PM	SiCl4 MFC set to  0.000000
3/13/2011	6:38:43 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	6:38:43 PM	Tube furnace set to 800
3/13/2011	6:39:43 PM	H2 valve closed
3/13/2011	6:39:43 PM	BCl3 valve closed
3/13/2011	6:39:43 PM	PH3 valve closed
3/13/2011	6:39:43 PM	SiCl4 pre valve closed
3/13/2011	6:39:43 PM	SiCl4 post valve closed
3/13/2011	6:39:43 PM	Bubbler valve closed
3/13/2011	6:39:43 PM	Helium valve opened
3/13/2011	6:39:43 PM	Main Vac valve opened
3/13/2011	6:39:43 PM	Bypass valve opened
3/13/2011	6:39:43 PM	Helium MFC set to  100.000000
3/13/2011	6:39:43 PM	H2 MFC set to  0.000000
3/13/2011	6:39:43 PM	BCl3 MFC set to  0.000000
3/13/2011	6:39:43 PM	PHl3 MFC set to  0.000000
3/13/2011	6:39:43 PM	SiCl4 MFC set to  0.000000
3/13/2011	6:39:43 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	6:39:43 PM	Tube furnace set to 800
3/13/2011	6:40:43 PM	Helium valve closed
3/13/2011	6:40:43 PM	H2 valve closed
3/13/2011	6:40:43 PM	BCl3 valve closed
3/13/2011	6:40:43 PM	PH3 valve closed
3/13/2011	6:40:43 PM	SiCl4 pre valve closed
3/13/2011	6:40:43 PM	SiCl4 post valve closed
3/13/2011	6:40:43 PM	Bubbler valve closed
3/13/2011	6:40:43 PM	Main Vac valve opened
3/13/2011	6:40:43 PM	Bypass valve opened
3/13/2011	6:40:43 PM	Helium MFC set to  0.000000
3/13/2011	6:40:43 PM	H2 MFC set to  0.000000
3/13/2011	6:40:43 PM	BCl3 MFC set to  0.000000
3/13/2011	6:40:43 PM	PHl3 MFC set to  0.000000
3/13/2011	6:40:43 PM	SiCl4 MFC set to  0.000000
3/13/2011	6:40:43 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	6:40:44 PM	Tube furnace set to 0
3/13/2011	6:41:44 PM	H2 valve closed
3/13/2011	6:41:44 PM	BCl3 valve closed
3/13/2011	6:41:44 PM	PH3 valve closed
3/13/2011	6:41:44 PM	SiCl4 pre valve closed
3/13/2011	6:41:44 PM	SiCl4 post valve closed
3/13/2011	6:41:44 PM	Bubbler valve closed
3/13/2011	6:41:44 PM	Helium valve opened
3/13/2011	6:41:44 PM	Main Vac valve opened
3/13/2011	6:41:44 PM	Bypass valve opened
3/13/2011	6:41:44 PM	Helium MFC set to  100.000000
3/13/2011	6:41:44 PM	H2 MFC set to  0.000000
3/13/2011	6:41:44 PM	BCl3 MFC set to  0.000000
3/13/2011	6:41:44 PM	PHl3 MFC set to  0.000000
3/13/2011	6:41:44 PM	SiCl4 MFC set to  0.000000
3/13/2011	6:41:44 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	6:41:44 PM	Tube furnace set to 0
3/13/2011	6:42:44 PM	Helium valve closed
3/13/2011	6:42:44 PM	H2 valve closed
3/13/2011	6:42:44 PM	BCl3 valve closed
3/13/2011	6:42:44 PM	PH3 valve closed
3/13/2011	6:42:44 PM	SiCl4 pre valve closed
3/13/2011	6:42:44 PM	SiCl4 post valve closed
3/13/2011	6:42:44 PM	Bubbler valve closed
3/13/2011	6:42:44 PM	Main Vac valve opened
3/13/2011	6:42:44 PM	Bypass valve opened
3/13/2011	6:42:44 PM	Helium MFC set to  0.000000
3/13/2011	6:42:44 PM	H2 MFC set to  0.000000
3/13/2011	6:42:44 PM	BCl3 MFC set to  0.000000
3/13/2011	6:42:44 PM	PHl3 MFC set to  0.000000
3/13/2011	6:42:44 PM	SiCl4 MFC set to  0.000000
3/13/2011	6:42:44 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	6:42:44 PM	Tube furnace set to 0
3/13/2011	6:43:44 PM	H2 valve closed
3/13/2011	6:43:44 PM	BCl3 valve closed
3/13/2011	6:43:44 PM	PH3 valve closed
3/13/2011	6:43:44 PM	SiCl4 pre valve closed
3/13/2011	6:43:44 PM	SiCl4 post valve closed
3/13/2011	6:43:44 PM	Bubbler valve closed
3/13/2011	6:43:44 PM	Helium valve opened
3/13/2011	6:43:44 PM	Main Vac valve opened
3/13/2011	6:43:44 PM	Bypass valve opened
3/13/2011	6:43:44 PM	Helium MFC set to  100.000000
3/13/2011	6:43:44 PM	H2 MFC set to  0.000000
3/13/2011	6:43:44 PM	BCl3 MFC set to  0.000000
3/13/2011	6:43:44 PM	PHl3 MFC set to  0.000000
3/13/2011	6:43:44 PM	SiCl4 MFC set to  0.000000
3/13/2011	6:43:44 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	6:43:44 PM	Tube furnace set to 0
3/13/2011	6:44:44 PM	Helium valve closed
3/13/2011	6:44:44 PM	H2 valve closed
3/13/2011	6:44:44 PM	BCl3 valve closed
3/13/2011	6:44:44 PM	PH3 valve closed
3/13/2011	6:44:44 PM	SiCl4 pre valve closed
3/13/2011	6:44:44 PM	SiCl4 post valve closed
3/13/2011	6:44:44 PM	Bubbler valve closed
3/13/2011	6:44:44 PM	Main Vac valve opened
3/13/2011	6:44:44 PM	Bypass valve opened
3/13/2011	6:44:44 PM	Helium MFC set to  0.000000
3/13/2011	6:44:44 PM	H2 MFC set to  0.000000
3/13/2011	6:44:44 PM	BCl3 MFC set to  0.000000
3/13/2011	6:44:44 PM	PHl3 MFC set to  0.000000
3/13/2011	6:44:44 PM	SiCl4 MFC set to  0.000000
3/13/2011	6:44:44 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	6:44:44 PM	Tube furnace set to 0
3/13/2011	6:44:45 PM	Run finished at 6:44 PM
3/13/2011	7:00:05 PM	Helium MFC set to  100.000000
3/13/2011	7:00:07 PM	Helium valve opened
3/13/2011	7:00:49 PM	Helium valve closed
3/13/2011	7:00:52 PM	Helium MFC set to  0.000000
3/13/2011	7:04:05 PM	Helium MFC set to  50.000000
3/13/2011	7:04:06 PM	Helium valve opened
3/13/2011	7:06:01 PM	Helium valve closed
3/13/2011	7:06:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2011	7:06:37 PM	Recipe started at 7:06 PM
3/13/2011	7:06:37 PM	H2 valve closed
3/13/2011	7:06:37 PM	BCl3 valve closed
3/13/2011	7:06:37 PM	PH3 valve closed
3/13/2011	7:06:37 PM	SiCl4 pre valve closed
3/13/2011	7:06:37 PM	SiCl4 post valve closed
3/13/2011	7:06:37 PM	Main Vac valve closed
3/13/2011	7:06:37 PM	Bypass valve closed
3/13/2011	7:06:37 PM	Bubbler valve closed
3/13/2011	7:06:37 PM	Helium valve opened
3/13/2011	7:06:37 PM	Helium MFC set to  500.000000
3/13/2011	7:06:37 PM	H2 MFC set to  0.000000
3/13/2011	7:06:37 PM	BCl3 MFC set to  0.000000
3/13/2011	7:06:37 PM	PHl3 MFC set to  0.000000
3/13/2011	7:06:37 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:06:37 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	7:06:37 PM	Tube furnace set to 0
3/13/2011	7:07:48 PM	Run aborted at 7:07 PM
3/13/2011	7:07:48 PM	Helium valve closed
3/13/2011	7:07:48 PM	H2 valve closed
3/13/2011	7:07:48 PM	BCl3 valve closed
3/13/2011	7:07:48 PM	PH3 valve closed
3/13/2011	7:07:48 PM	SiCl4 pre valve closed
3/13/2011	7:07:48 PM	SiCl4 post valve closed
3/13/2011	7:07:48 PM	Bypass valve closed
3/13/2011	7:07:48 PM	Main Vac valve closed
3/13/2011	7:07:48 PM	Bubbler valve closed
3/13/2011	7:07:48 PM	Helium MFC set to  0.000000
3/13/2011	7:07:48 PM	H2 MFC set to  0.000000
3/13/2011	7:07:48 PM	BCl3 MFC set to  0.000000
3/13/2011	7:07:48 PM	PHl3 MFC set to  0.000000
3/13/2011	7:07:48 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:07:48 PM	Tube furnace set to 0
3/13/2011	7:07:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2011	7:08:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2011	7:08:09 PM	Recipe started at 7:08 PM
3/13/2011	7:08:09 PM	H2 valve closed
3/13/2011	7:08:09 PM	BCl3 valve closed
3/13/2011	7:08:09 PM	PH3 valve closed
3/13/2011	7:08:09 PM	SiCl4 pre valve closed
3/13/2011	7:08:09 PM	SiCl4 post valve closed
3/13/2011	7:08:09 PM	Main Vac valve closed
3/13/2011	7:08:09 PM	Bypass valve closed
3/13/2011	7:08:09 PM	Bubbler valve closed
3/13/2011	7:08:09 PM	Helium valve opened
3/13/2011	7:08:09 PM	Helium MFC set to  500.000000
3/13/2011	7:08:09 PM	H2 MFC set to  0.000000
3/13/2011	7:08:09 PM	BCl3 MFC set to  0.000000
3/13/2011	7:08:09 PM	PHl3 MFC set to  0.000000
3/13/2011	7:08:09 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:08:09 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	7:08:10 PM	Tube furnace set to 0
3/13/2011	7:08:13 PM	Run aborted at 7:08 PM
3/13/2011	7:08:13 PM	Helium valve closed
3/13/2011	7:08:13 PM	H2 valve closed
3/13/2011	7:08:13 PM	BCl3 valve closed
3/13/2011	7:08:13 PM	PH3 valve closed
3/13/2011	7:08:13 PM	SiCl4 pre valve closed
3/13/2011	7:08:13 PM	SiCl4 post valve closed
3/13/2011	7:08:13 PM	Bypass valve closed
3/13/2011	7:08:13 PM	Main Vac valve closed
3/13/2011	7:08:13 PM	Bubbler valve closed
3/13/2011	7:08:13 PM	Helium MFC set to  0.000000
3/13/2011	7:08:13 PM	H2 MFC set to  0.000000
3/13/2011	7:08:13 PM	BCl3 MFC set to  0.000000
3/13/2011	7:08:13 PM	PHl3 MFC set to  0.000000
3/13/2011	7:08:13 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:08:13 PM	Tube furnace set to 0
3/13/2011	7:08:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2011	7:08:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2011	7:08:16 PM	Recipe started at 7:08 PM
3/13/2011	7:08:16 PM	Helium valve closed
3/13/2011	7:08:16 PM	H2 valve closed
3/13/2011	7:08:16 PM	BCl3 valve closed
3/13/2011	7:08:16 PM	PH3 valve closed
3/13/2011	7:08:16 PM	SiCl4 pre valve closed
3/13/2011	7:08:16 PM	SiCl4 post valve closed
3/13/2011	7:08:16 PM	Main Vac valve closed
3/13/2011	7:08:16 PM	Bubbler valve closed
3/13/2011	7:08:16 PM	Bypass valve opened
3/13/2011	7:08:16 PM	Helium MFC set to  0.000000
3/13/2011	7:08:16 PM	H2 MFC set to  0.000000
3/13/2011	7:08:16 PM	BCl3 MFC set to  0.000000
3/13/2011	7:08:16 PM	PHl3 MFC set to  0.000000
3/13/2011	7:08:16 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:08:16 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	7:08:16 PM	Tube furnace set to 0
3/13/2011	7:08:37 PM	Helium valve closed
3/13/2011	7:08:37 PM	H2 valve closed
3/13/2011	7:08:37 PM	BCl3 valve closed
3/13/2011	7:08:37 PM	PH3 valve closed
3/13/2011	7:08:37 PM	SiCl4 pre valve closed
3/13/2011	7:08:37 PM	SiCl4 post valve closed
3/13/2011	7:08:37 PM	Bubbler valve closed
3/13/2011	7:08:37 PM	Main Vac valve opened
3/13/2011	7:08:37 PM	Bypass valve opened
3/13/2011	7:08:37 PM	Helium MFC set to  0.000000
3/13/2011	7:08:37 PM	H2 MFC set to  0.000000
3/13/2011	7:08:37 PM	BCl3 MFC set to  0.000000
3/13/2011	7:08:37 PM	PHl3 MFC set to  0.000000
3/13/2011	7:08:37 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:08:37 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	7:08:38 PM	Tube furnace set to 0
3/13/2011	7:08:38 PM	Run finished at 7:08 PM
3/13/2011	7:08:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2011	7:09:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2011	7:09:49 PM	Recipe started at 7:09 PM
3/13/2011	7:09:49 PM	H2 valve closed
3/13/2011	7:09:49 PM	BCl3 valve closed
3/13/2011	7:09:49 PM	PH3 valve closed
3/13/2011	7:09:49 PM	SiCl4 pre valve closed
3/13/2011	7:09:49 PM	SiCl4 post valve closed
3/13/2011	7:09:49 PM	Main Vac valve closed
3/13/2011	7:09:49 PM	Bypass valve closed
3/13/2011	7:09:49 PM	Bubbler valve closed
3/13/2011	7:09:49 PM	Helium valve opened
3/13/2011	7:09:49 PM	Helium MFC set to  500.000000
3/13/2011	7:09:49 PM	H2 MFC set to  0.000000
3/13/2011	7:09:49 PM	BCl3 MFC set to  0.000000
3/13/2011	7:09:49 PM	PHl3 MFC set to  0.000000
3/13/2011	7:09:49 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:09:49 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	7:09:49 PM	Tube furnace set to 0
3/13/2011	7:11:04 PM	Helium valve closed
3/13/2011	7:11:04 PM	H2 valve closed
3/13/2011	7:11:04 PM	BCl3 valve closed
3/13/2011	7:11:04 PM	PH3 valve closed
3/13/2011	7:11:04 PM	SiCl4 pre valve closed
3/13/2011	7:11:04 PM	SiCl4 post valve closed
3/13/2011	7:11:04 PM	Main Vac valve closed
3/13/2011	7:11:04 PM	Bypass valve closed
3/13/2011	7:11:04 PM	Bubbler valve closed
3/13/2011	7:11:04 PM	Helium MFC set to  0.000000
3/13/2011	7:11:04 PM	H2 MFC set to  0.000000
3/13/2011	7:11:04 PM	BCl3 MFC set to  0.000000
3/13/2011	7:11:04 PM	PHl3 MFC set to  0.000000
3/13/2011	7:11:04 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:11:04 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	7:11:05 PM	Tube furnace set to 0
3/13/2011	7:11:05 PM	Run finished at 7:11 PM
3/13/2011	7:11:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2011	7:18:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2011	7:18:56 PM	Recipe started at 7:18 PM
3/13/2011	7:18:56 PM	Helium valve closed
3/13/2011	7:18:56 PM	H2 valve closed
3/13/2011	7:18:56 PM	BCl3 valve closed
3/13/2011	7:18:56 PM	PH3 valve closed
3/13/2011	7:18:56 PM	SiCl4 pre valve closed
3/13/2011	7:18:56 PM	SiCl4 post valve closed
3/13/2011	7:18:56 PM	Main Vac valve closed
3/13/2011	7:18:56 PM	Bubbler valve closed
3/13/2011	7:18:56 PM	Bypass valve opened
3/13/2011	7:18:56 PM	Helium MFC set to  0.000000
3/13/2011	7:18:56 PM	H2 MFC set to  0.000000
3/13/2011	7:18:56 PM	BCl3 MFC set to  0.000000
3/13/2011	7:18:56 PM	PHl3 MFC set to  0.000000
3/13/2011	7:18:56 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:18:56 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	7:18:56 PM	Tube furnace set to 0
3/13/2011	7:19:27 PM	Helium valve closed
3/13/2011	7:19:27 PM	H2 valve closed
3/13/2011	7:19:27 PM	BCl3 valve closed
3/13/2011	7:19:27 PM	PH3 valve closed
3/13/2011	7:19:27 PM	SiCl4 pre valve closed
3/13/2011	7:19:27 PM	SiCl4 post valve closed
3/13/2011	7:19:27 PM	Bubbler valve closed
3/13/2011	7:19:27 PM	Main Vac valve opened
3/13/2011	7:19:27 PM	Bypass valve opened
3/13/2011	7:19:27 PM	Helium MFC set to  0.000000
3/13/2011	7:19:27 PM	H2 MFC set to  0.000000
3/13/2011	7:19:27 PM	BCl3 MFC set to  0.000000
3/13/2011	7:19:27 PM	PHl3 MFC set to  0.000000
3/13/2011	7:19:27 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:19:27 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	7:19:27 PM	Tube furnace set to 0
3/13/2011	7:19:27 PM	Run finished at 7:19 PM
3/13/2011	7:19:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2011	7:20:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/13/2011	7:20:32 PM	Recipe started at 7:20 PM
3/13/2011	7:20:32 PM	Helium valve closed
3/13/2011	7:20:32 PM	H2 valve closed
3/13/2011	7:20:32 PM	BCl3 valve closed
3/13/2011	7:20:32 PM	PH3 valve closed
3/13/2011	7:20:32 PM	SiCl4 pre valve closed
3/13/2011	7:20:32 PM	SiCl4 post valve closed
3/13/2011	7:20:32 PM	Main Vac valve closed
3/13/2011	7:20:32 PM	Bubbler valve closed
3/13/2011	7:20:32 PM	Bypass valve opened
3/13/2011	7:20:32 PM	Helium MFC set to  0.000000
3/13/2011	7:20:32 PM	H2 MFC set to  0.000000
3/13/2011	7:20:32 PM	BCl3 MFC set to  0.000000
3/13/2011	7:20:32 PM	PHl3 MFC set to  0.000000
3/13/2011	7:20:32 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:20:32 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	7:20:32 PM	Tube furnace set to 0
3/13/2011	7:20:33 PM	Helium valve closed
3/13/2011	7:20:33 PM	H2 valve closed
3/13/2011	7:20:33 PM	BCl3 valve closed
3/13/2011	7:20:33 PM	PH3 valve closed
3/13/2011	7:20:33 PM	SiCl4 pre valve closed
3/13/2011	7:20:33 PM	SiCl4 post valve closed
3/13/2011	7:20:33 PM	Bubbler valve closed
3/13/2011	7:20:33 PM	Main Vac valve opened
3/13/2011	7:20:33 PM	Bypass valve opened
3/13/2011	7:20:33 PM	Helium MFC set to  0.000000
3/13/2011	7:20:33 PM	H2 MFC set to  0.000000
3/13/2011	7:20:33 PM	BCl3 MFC set to  0.000000
3/13/2011	7:20:33 PM	PHl3 MFC set to  0.000000
3/13/2011	7:20:33 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:20:33 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	7:20:33 PM	Tube furnace set to 0
3/13/2011	7:21:33 PM	H2 valve closed
3/13/2011	7:21:33 PM	BCl3 valve closed
3/13/2011	7:21:33 PM	PH3 valve closed
3/13/2011	7:21:33 PM	SiCl4 pre valve closed
3/13/2011	7:21:33 PM	SiCl4 post valve closed
3/13/2011	7:21:33 PM	Bubbler valve closed
3/13/2011	7:21:33 PM	Helium valve opened
3/13/2011	7:21:33 PM	Main Vac valve opened
3/13/2011	7:21:33 PM	Bypass valve opened
3/13/2011	7:21:33 PM	Helium MFC set to  100.000000
3/13/2011	7:21:33 PM	H2 MFC set to  0.000000
3/13/2011	7:21:33 PM	BCl3 MFC set to  0.000000
3/13/2011	7:21:33 PM	PHl3 MFC set to  0.000000
3/13/2011	7:21:33 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:21:33 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	7:21:33 PM	Tube furnace set to 0
3/13/2011	7:22:33 PM	Helium valve closed
3/13/2011	7:22:33 PM	H2 valve closed
3/13/2011	7:22:33 PM	BCl3 valve closed
3/13/2011	7:22:33 PM	PH3 valve closed
3/13/2011	7:22:33 PM	SiCl4 pre valve closed
3/13/2011	7:22:33 PM	SiCl4 post valve closed
3/13/2011	7:22:33 PM	Bubbler valve closed
3/13/2011	7:22:33 PM	Main Vac valve opened
3/13/2011	7:22:33 PM	Bypass valve opened
3/13/2011	7:22:33 PM	Helium MFC set to  0.000000
3/13/2011	7:22:33 PM	H2 MFC set to  0.000000
3/13/2011	7:22:33 PM	BCl3 MFC set to  0.000000
3/13/2011	7:22:33 PM	PHl3 MFC set to  0.000000
3/13/2011	7:22:33 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:22:33 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	7:22:33 PM	Tube furnace set to 0
3/13/2011	7:23:33 PM	H2 valve closed
3/13/2011	7:23:33 PM	BCl3 valve closed
3/13/2011	7:23:33 PM	PH3 valve closed
3/13/2011	7:23:33 PM	SiCl4 pre valve closed
3/13/2011	7:23:33 PM	SiCl4 post valve closed
3/13/2011	7:23:33 PM	Bubbler valve closed
3/13/2011	7:23:33 PM	Helium valve opened
3/13/2011	7:23:33 PM	Main Vac valve opened
3/13/2011	7:23:33 PM	Bypass valve opened
3/13/2011	7:23:33 PM	Helium MFC set to  100.000000
3/13/2011	7:23:33 PM	H2 MFC set to  0.000000
3/13/2011	7:23:33 PM	BCl3 MFC set to  0.000000
3/13/2011	7:23:33 PM	PHl3 MFC set to  0.000000
3/13/2011	7:23:33 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:23:33 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	7:23:33 PM	Tube furnace set to 0
3/13/2011	7:24:33 PM	Helium valve closed
3/13/2011	7:24:33 PM	H2 valve closed
3/13/2011	7:24:33 PM	BCl3 valve closed
3/13/2011	7:24:33 PM	PH3 valve closed
3/13/2011	7:24:33 PM	SiCl4 pre valve closed
3/13/2011	7:24:33 PM	SiCl4 post valve closed
3/13/2011	7:24:33 PM	Bubbler valve closed
3/13/2011	7:24:33 PM	Main Vac valve opened
3/13/2011	7:24:33 PM	Bypass valve opened
3/13/2011	7:24:33 PM	Helium MFC set to  0.000000
3/13/2011	7:24:33 PM	H2 MFC set to  0.000000
3/13/2011	7:24:33 PM	BCl3 MFC set to  0.000000
3/13/2011	7:24:33 PM	PHl3 MFC set to  0.000000
3/13/2011	7:24:33 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:24:33 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	7:24:34 PM	Tube furnace set to 0
3/13/2011	7:25:34 PM	H2 valve closed
3/13/2011	7:25:34 PM	BCl3 valve closed
3/13/2011	7:25:34 PM	PH3 valve closed
3/13/2011	7:25:34 PM	SiCl4 pre valve closed
3/13/2011	7:25:34 PM	SiCl4 post valve closed
3/13/2011	7:25:34 PM	Bubbler valve closed
3/13/2011	7:25:34 PM	Helium valve opened
3/13/2011	7:25:34 PM	Main Vac valve opened
3/13/2011	7:25:34 PM	Bypass valve opened
3/13/2011	7:25:34 PM	Helium MFC set to  100.000000
3/13/2011	7:25:34 PM	H2 MFC set to  0.000000
3/13/2011	7:25:34 PM	BCl3 MFC set to  0.000000
3/13/2011	7:25:34 PM	PHl3 MFC set to  0.000000
3/13/2011	7:25:34 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:25:34 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	7:25:34 PM	Tube furnace set to 0
3/13/2011	7:26:34 PM	Helium valve closed
3/13/2011	7:26:34 PM	H2 valve closed
3/13/2011	7:26:34 PM	BCl3 valve closed
3/13/2011	7:26:34 PM	PH3 valve closed
3/13/2011	7:26:34 PM	SiCl4 pre valve closed
3/13/2011	7:26:34 PM	SiCl4 post valve closed
3/13/2011	7:26:34 PM	Bubbler valve closed
3/13/2011	7:26:34 PM	Main Vac valve opened
3/13/2011	7:26:34 PM	Bypass valve opened
3/13/2011	7:26:34 PM	Helium MFC set to  0.000000
3/13/2011	7:26:34 PM	H2 MFC set to  0.000000
3/13/2011	7:26:34 PM	BCl3 MFC set to  0.000000
3/13/2011	7:26:34 PM	PHl3 MFC set to  0.000000
3/13/2011	7:26:34 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:26:34 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	7:26:34 PM	Tube furnace set to 0
3/13/2011	7:27:34 PM	H2 valve closed
3/13/2011	7:27:34 PM	BCl3 valve closed
3/13/2011	7:27:34 PM	PH3 valve closed
3/13/2011	7:27:34 PM	SiCl4 pre valve closed
3/13/2011	7:27:34 PM	SiCl4 post valve closed
3/13/2011	7:27:34 PM	Bubbler valve closed
3/13/2011	7:27:34 PM	Helium valve opened
3/13/2011	7:27:34 PM	Main Vac valve opened
3/13/2011	7:27:34 PM	Bypass valve opened
3/13/2011	7:27:34 PM	Helium MFC set to  100.000000
3/13/2011	7:27:34 PM	H2 MFC set to  0.000000
3/13/2011	7:27:34 PM	BCl3 MFC set to  0.000000
3/13/2011	7:27:34 PM	PHl3 MFC set to  0.000000
3/13/2011	7:27:34 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:27:34 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	7:27:34 PM	Tube furnace set to 0
3/13/2011	7:28:34 PM	Helium valve closed
3/13/2011	7:28:34 PM	H2 valve closed
3/13/2011	7:28:34 PM	BCl3 valve closed
3/13/2011	7:28:34 PM	PH3 valve closed
3/13/2011	7:28:34 PM	SiCl4 pre valve closed
3/13/2011	7:28:34 PM	SiCl4 post valve closed
3/13/2011	7:28:34 PM	Bubbler valve closed
3/13/2011	7:28:34 PM	Main Vac valve opened
3/13/2011	7:28:34 PM	Bypass valve opened
3/13/2011	7:28:34 PM	Helium MFC set to  0.000000
3/13/2011	7:28:34 PM	H2 MFC set to  0.000000
3/13/2011	7:28:34 PM	BCl3 MFC set to  0.000000
3/13/2011	7:28:34 PM	PHl3 MFC set to  0.000000
3/13/2011	7:28:34 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:28:34 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	7:28:34 PM	Tube furnace set to 0
3/13/2011	7:29:34 PM	H2 valve closed
3/13/2011	7:29:34 PM	BCl3 valve closed
3/13/2011	7:29:34 PM	PH3 valve closed
3/13/2011	7:29:34 PM	SiCl4 pre valve closed
3/13/2011	7:29:34 PM	SiCl4 post valve closed
3/13/2011	7:29:34 PM	Bubbler valve closed
3/13/2011	7:29:34 PM	Helium valve opened
3/13/2011	7:29:34 PM	Main Vac valve opened
3/13/2011	7:29:34 PM	Bypass valve opened
3/13/2011	7:29:34 PM	Helium MFC set to  100.000000
3/13/2011	7:29:34 PM	H2 MFC set to  0.000000
3/13/2011	7:29:34 PM	BCl3 MFC set to  0.000000
3/13/2011	7:29:34 PM	PHl3 MFC set to  0.000000
3/13/2011	7:29:34 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:29:34 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	7:29:35 PM	Tube furnace set to 0
3/13/2011	7:30:35 PM	Helium valve closed
3/13/2011	7:30:35 PM	H2 valve closed
3/13/2011	7:30:35 PM	BCl3 valve closed
3/13/2011	7:30:35 PM	PH3 valve closed
3/13/2011	7:30:35 PM	SiCl4 pre valve closed
3/13/2011	7:30:35 PM	SiCl4 post valve closed
3/13/2011	7:30:35 PM	Bubbler valve closed
3/13/2011	7:30:35 PM	Main Vac valve opened
3/13/2011	7:30:35 PM	Bypass valve opened
3/13/2011	7:30:35 PM	Helium MFC set to  0.000000
3/13/2011	7:30:35 PM	H2 MFC set to  0.000000
3/13/2011	7:30:35 PM	BCl3 MFC set to  0.000000
3/13/2011	7:30:35 PM	PHl3 MFC set to  0.000000
3/13/2011	7:30:35 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:30:35 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	7:30:35 PM	Tube furnace set to 0
3/13/2011	7:31:35 PM	H2 valve closed
3/13/2011	7:31:35 PM	BCl3 valve closed
3/13/2011	7:31:35 PM	PH3 valve closed
3/13/2011	7:31:35 PM	SiCl4 pre valve closed
3/13/2011	7:31:35 PM	SiCl4 post valve closed
3/13/2011	7:31:35 PM	Bubbler valve closed
3/13/2011	7:31:35 PM	Helium valve opened
3/13/2011	7:31:35 PM	Main Vac valve opened
3/13/2011	7:31:35 PM	Bypass valve opened
3/13/2011	7:31:35 PM	Helium MFC set to  100.000000
3/13/2011	7:31:35 PM	H2 MFC set to  0.000000
3/13/2011	7:31:35 PM	BCl3 MFC set to  0.000000
3/13/2011	7:31:35 PM	PHl3 MFC set to  0.000000
3/13/2011	7:31:35 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:31:35 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	7:31:35 PM	Tube furnace set to 0
3/13/2011	7:32:35 PM	Helium valve closed
3/13/2011	7:32:35 PM	H2 valve closed
3/13/2011	7:32:35 PM	BCl3 valve closed
3/13/2011	7:32:35 PM	PH3 valve closed
3/13/2011	7:32:35 PM	SiCl4 pre valve closed
3/13/2011	7:32:35 PM	SiCl4 post valve closed
3/13/2011	7:32:35 PM	Bubbler valve closed
3/13/2011	7:32:35 PM	Main Vac valve opened
3/13/2011	7:32:35 PM	Bypass valve opened
3/13/2011	7:32:35 PM	Helium MFC set to  0.000000
3/13/2011	7:32:35 PM	H2 MFC set to  0.000000
3/13/2011	7:32:35 PM	BCl3 MFC set to  0.000000
3/13/2011	7:32:35 PM	PHl3 MFC set to  0.000000
3/13/2011	7:32:35 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:32:35 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	7:32:35 PM	Tube furnace set to 0
3/13/2011	7:33:35 PM	H2 valve closed
3/13/2011	7:33:35 PM	BCl3 valve closed
3/13/2011	7:33:35 PM	PH3 valve closed
3/13/2011	7:33:35 PM	SiCl4 pre valve closed
3/13/2011	7:33:35 PM	SiCl4 post valve closed
3/13/2011	7:33:35 PM	Bubbler valve closed
3/13/2011	7:33:35 PM	Helium valve opened
3/13/2011	7:33:35 PM	Main Vac valve opened
3/13/2011	7:33:35 PM	Bypass valve opened
3/13/2011	7:33:35 PM	Helium MFC set to  100.000000
3/13/2011	7:33:35 PM	H2 MFC set to  0.000000
3/13/2011	7:33:35 PM	BCl3 MFC set to  0.000000
3/13/2011	7:33:35 PM	PHl3 MFC set to  0.000000
3/13/2011	7:33:35 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:33:35 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	7:33:35 PM	Tube furnace set to 0
3/13/2011	7:34:35 PM	Helium valve closed
3/13/2011	7:34:35 PM	H2 valve closed
3/13/2011	7:34:35 PM	BCl3 valve closed
3/13/2011	7:34:35 PM	PH3 valve closed
3/13/2011	7:34:35 PM	SiCl4 pre valve closed
3/13/2011	7:34:35 PM	SiCl4 post valve closed
3/13/2011	7:34:35 PM	Bubbler valve closed
3/13/2011	7:34:35 PM	Main Vac valve opened
3/13/2011	7:34:35 PM	Bypass valve opened
3/13/2011	7:34:35 PM	Helium MFC set to  0.000000
3/13/2011	7:34:35 PM	H2 MFC set to  0.000000
3/13/2011	7:34:35 PM	BCl3 MFC set to  0.000000
3/13/2011	7:34:35 PM	PHl3 MFC set to  0.000000
3/13/2011	7:34:35 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:34:35 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	7:34:36 PM	Tube furnace set to 0
3/13/2011	7:35:36 PM	H2 valve closed
3/13/2011	7:35:36 PM	BCl3 valve closed
3/13/2011	7:35:36 PM	PH3 valve closed
3/13/2011	7:35:36 PM	SiCl4 pre valve closed
3/13/2011	7:35:36 PM	SiCl4 post valve closed
3/13/2011	7:35:36 PM	Bubbler valve closed
3/13/2011	7:35:36 PM	Helium valve opened
3/13/2011	7:35:36 PM	Main Vac valve opened
3/13/2011	7:35:36 PM	Bypass valve opened
3/13/2011	7:35:36 PM	Helium MFC set to  100.000000
3/13/2011	7:35:36 PM	H2 MFC set to  0.000000
3/13/2011	7:35:36 PM	BCl3 MFC set to  0.000000
3/13/2011	7:35:36 PM	PHl3 MFC set to  0.000000
3/13/2011	7:35:36 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:35:36 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	7:35:36 PM	Tube furnace set to 0
3/13/2011	7:36:36 PM	Helium valve closed
3/13/2011	7:36:36 PM	H2 valve closed
3/13/2011	7:36:36 PM	BCl3 valve closed
3/13/2011	7:36:36 PM	PH3 valve closed
3/13/2011	7:36:36 PM	SiCl4 pre valve closed
3/13/2011	7:36:36 PM	SiCl4 post valve closed
3/13/2011	7:36:36 PM	Bubbler valve closed
3/13/2011	7:36:36 PM	Main Vac valve opened
3/13/2011	7:36:36 PM	Bypass valve opened
3/13/2011	7:36:36 PM	Helium MFC set to  0.000000
3/13/2011	7:36:36 PM	H2 MFC set to  0.000000
3/13/2011	7:36:36 PM	BCl3 MFC set to  0.000000
3/13/2011	7:36:36 PM	PHl3 MFC set to  0.000000
3/13/2011	7:36:36 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:36:36 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	7:36:36 PM	Tube furnace set to 0
3/13/2011	7:37:36 PM	H2 valve closed
3/13/2011	7:37:36 PM	BCl3 valve closed
3/13/2011	7:37:36 PM	PH3 valve closed
3/13/2011	7:37:36 PM	SiCl4 pre valve closed
3/13/2011	7:37:36 PM	SiCl4 post valve closed
3/13/2011	7:37:36 PM	Bubbler valve closed
3/13/2011	7:37:36 PM	Helium valve opened
3/13/2011	7:37:36 PM	Main Vac valve opened
3/13/2011	7:37:36 PM	Bypass valve opened
3/13/2011	7:37:36 PM	Helium MFC set to  100.000000
3/13/2011	7:37:36 PM	H2 MFC set to  0.000000
3/13/2011	7:37:36 PM	BCl3 MFC set to  0.000000
3/13/2011	7:37:36 PM	PHl3 MFC set to  0.000000
3/13/2011	7:37:36 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:37:36 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	7:37:36 PM	Tube furnace set to 0
3/13/2011	7:38:36 PM	Helium valve closed
3/13/2011	7:38:36 PM	H2 valve closed
3/13/2011	7:38:36 PM	BCl3 valve closed
3/13/2011	7:38:36 PM	PH3 valve closed
3/13/2011	7:38:36 PM	SiCl4 pre valve closed
3/13/2011	7:38:36 PM	SiCl4 post valve closed
3/13/2011	7:38:36 PM	Bubbler valve closed
3/13/2011	7:38:36 PM	Main Vac valve opened
3/13/2011	7:38:36 PM	Bypass valve opened
3/13/2011	7:38:36 PM	Helium MFC set to  0.000000
3/13/2011	7:38:36 PM	H2 MFC set to  0.000000
3/13/2011	7:38:36 PM	BCl3 MFC set to  0.000000
3/13/2011	7:38:36 PM	PHl3 MFC set to  0.000000
3/13/2011	7:38:36 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:38:36 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	7:38:36 PM	Tube furnace set to 0
3/13/2011	7:39:36 PM	H2 valve closed
3/13/2011	7:39:36 PM	BCl3 valve closed
3/13/2011	7:39:36 PM	PH3 valve closed
3/13/2011	7:39:36 PM	SiCl4 pre valve closed
3/13/2011	7:39:36 PM	SiCl4 post valve closed
3/13/2011	7:39:36 PM	Bubbler valve closed
3/13/2011	7:39:36 PM	Helium valve opened
3/13/2011	7:39:36 PM	Main Vac valve opened
3/13/2011	7:39:36 PM	Bypass valve opened
3/13/2011	7:39:36 PM	Helium MFC set to  100.000000
3/13/2011	7:39:36 PM	H2 MFC set to  0.000000
3/13/2011	7:39:36 PM	BCl3 MFC set to  0.000000
3/13/2011	7:39:36 PM	PHl3 MFC set to  0.000000
3/13/2011	7:39:36 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:39:36 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	7:39:36 PM	Tube furnace set to 0
3/13/2011	7:40:37 PM	Helium valve closed
3/13/2011	7:40:37 PM	H2 valve closed
3/13/2011	7:40:37 PM	BCl3 valve closed
3/13/2011	7:40:37 PM	PH3 valve closed
3/13/2011	7:40:37 PM	SiCl4 pre valve closed
3/13/2011	7:40:37 PM	SiCl4 post valve closed
3/13/2011	7:40:37 PM	Bubbler valve closed
3/13/2011	7:40:37 PM	Main Vac valve opened
3/13/2011	7:40:37 PM	Bypass valve opened
3/13/2011	7:40:37 PM	Helium MFC set to  0.000000
3/13/2011	7:40:37 PM	H2 MFC set to  0.000000
3/13/2011	7:40:37 PM	BCl3 MFC set to  0.000000
3/13/2011	7:40:37 PM	PHl3 MFC set to  0.000000
3/13/2011	7:40:37 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:40:37 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	7:40:37 PM	Tube furnace set to 0
3/13/2011	7:40:38 PM	Run finished at 7:40 PM
3/13/2011	7:40:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/13/2011	7:47:09 PM	Helium MFC set to  50.000000
3/13/2011	7:47:10 PM	Helium valve opened
3/13/2011	7:47:11 PM	Helium valve closed
3/13/2011	7:47:11 PM	Helium valve opened
3/13/2011	7:48:06 PM	Helium valve closed
3/13/2011	7:48:42 PM	Helium valve opened
3/13/2011	7:48:56 PM	Helium valve closed
3/13/2011	7:49:49 PM	Helium valve opened
3/13/2011	7:49:52 PM	Helium MFC set to  30.000000
3/13/2011	7:50:21 PM	Helium valve closed
3/13/2011	7:51:23 PM	Main Vac valve closed
3/13/2011	7:51:25 PM	Bypass valve closed
3/13/2011	7:51:37 PM	Bypass valve opened
3/13/2011	7:51:38 PM	Main Vac valve opened
3/13/2011	7:51:41 PM	Helium valve opened
3/13/2011	7:51:44 PM	Helium valve closed
3/13/2011	7:51:47 PM	Helium MFC set to  0.000000
3/13/2011	7:53:07 PM	Recipe started at 7:53 PM
3/13/2011	7:53:07 PM	Helium valve closed
3/13/2011	7:53:07 PM	BCl3 valve closed
3/13/2011	7:53:07 PM	PH3 valve closed
3/13/2011	7:53:07 PM	SiCl4 pre valve closed
3/13/2011	7:53:07 PM	SiCl4 post valve closed
3/13/2011	7:53:07 PM	Main Vac valve closed
3/13/2011	7:53:07 PM	Bypass valve closed
3/13/2011	7:53:07 PM	Bubbler valve closed
3/13/2011	7:53:07 PM	H2 valve opened
3/13/2011	7:53:07 PM	Helium MFC set to  0.000000
3/13/2011	7:53:07 PM	H2 MFC set to  500.000000
3/13/2011	7:53:07 PM	BCl3 MFC set to  0.000000
3/13/2011	7:53:07 PM	PHl3 MFC set to  0.000000
3/13/2011	7:53:07 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:53:07 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	7:53:07 PM	Tube furnace set to 200
3/13/2011	7:54:26 PM	Helium valve closed
3/13/2011	7:54:26 PM	BCl3 valve closed
3/13/2011	7:54:26 PM	PH3 valve closed
3/13/2011	7:54:26 PM	SiCl4 pre valve closed
3/13/2011	7:54:26 PM	SiCl4 post valve closed
3/13/2011	7:54:26 PM	Main Vac valve closed
3/13/2011	7:54:26 PM	Bypass valve closed
3/13/2011	7:54:26 PM	H2 valve opened
3/13/2011	7:54:26 PM	Bubbler valve opened
3/13/2011	7:54:26 PM	Helium MFC set to  0.000000
3/13/2011	7:54:26 PM	H2 MFC set to  400.000000
3/13/2011	7:54:26 PM	BCl3 MFC set to  0.000000
3/13/2011	7:54:26 PM	PHl3 MFC set to  0.000000
3/13/2011	7:54:26 PM	SiCl4 MFC set to  0.000000
3/13/2011	7:54:26 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	7:54:26 PM	Tube furnace set to 1001
3/13/2011	8:12:26 PM	Helium valve closed
3/13/2011	8:12:26 PM	BCl3 valve closed
3/13/2011	8:12:26 PM	PH3 valve closed
3/13/2011	8:12:26 PM	SiCl4 pre valve closed
3/13/2011	8:12:26 PM	SiCl4 post valve closed
3/13/2011	8:12:26 PM	Main Vac valve closed
3/13/2011	8:12:26 PM	Bypass valve closed
3/13/2011	8:12:26 PM	H2 valve opened
3/13/2011	8:12:26 PM	Bubbler valve opened
3/13/2011	8:12:26 PM	Helium MFC set to  0.000000
3/13/2011	8:12:26 PM	H2 MFC set to  400.000000
3/13/2011	8:12:26 PM	BCl3 MFC set to  0.000000
3/13/2011	8:12:26 PM	PHl3 MFC set to  0.000000
3/13/2011	8:12:26 PM	SiCl4 MFC set to  0.000000
3/13/2011	8:12:26 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	8:12:26 PM	Tube furnace set to 1000
3/13/2011	8:16:26 PM	Helium valve closed
3/13/2011	8:16:26 PM	PH3 valve closed
3/13/2011	8:16:26 PM	Main Vac valve closed
3/13/2011	8:16:26 PM	Bypass valve closed
3/13/2011	8:16:26 PM	H2 valve opened
3/13/2011	8:16:26 PM	BCl3 valve opened
3/13/2011	8:16:26 PM	SiCl4 pre valve opened
3/13/2011	8:16:26 PM	SiCl4 post valve opened
3/13/2011	8:16:26 PM	Bubbler valve opened
3/13/2011	8:16:26 PM	Helium MFC set to  0.000000
3/13/2011	8:16:26 PM	H2 MFC set to  490.000000
3/13/2011	8:16:26 PM	BCl3 MFC set to  3.500000
3/13/2011	8:16:26 PM	PHl3 MFC set to  0.000000
3/13/2011	8:16:26 PM	SiCl4 MFC set to  50.000000
3/13/2011	8:16:26 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	8:16:26 PM	Tube furnace set to 1000
3/13/2011	8:31:26 PM	Helium valve closed
3/13/2011	8:31:26 PM	BCl3 valve closed
3/13/2011	8:31:26 PM	PH3 valve closed
3/13/2011	8:31:26 PM	SiCl4 pre valve closed
3/13/2011	8:31:26 PM	SiCl4 post valve closed
3/13/2011	8:31:26 PM	Main Vac valve closed
3/13/2011	8:31:26 PM	Bypass valve closed
3/13/2011	8:31:26 PM	H2 valve opened
3/13/2011	8:31:26 PM	Bubbler valve opened
3/13/2011	8:31:26 PM	Helium MFC set to  0.000000
3/13/2011	8:31:26 PM	H2 MFC set to  500.000000
3/13/2011	8:31:26 PM	BCl3 MFC set to  0.000000
3/13/2011	8:31:26 PM	PHl3 MFC set to  0.000000
3/13/2011	8:31:26 PM	SiCl4 MFC set to  0.000000
3/13/2011	8:31:26 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	8:31:26 PM	Tube furnace set to 0
3/13/2011	8:34:16 PM	H2 valve closed
3/13/2011	8:34:16 PM	BCl3 valve closed
3/13/2011	8:34:16 PM	PH3 valve closed
3/13/2011	8:34:16 PM	SiCl4 pre valve closed
3/13/2011	8:34:16 PM	SiCl4 post valve closed
3/13/2011	8:34:16 PM	Main Vac valve closed
3/13/2011	8:34:16 PM	Bypass valve closed
3/13/2011	8:34:16 PM	Helium valve opened
3/13/2011	8:34:16 PM	Bubbler valve opened
3/13/2011	8:34:16 PM	Helium MFC set to  400.000000
3/13/2011	8:34:16 PM	H2 MFC set to  0.000000
3/13/2011	8:34:16 PM	BCl3 MFC set to  0.000000
3/13/2011	8:34:16 PM	PHl3 MFC set to  0.000000
3/13/2011	8:34:16 PM	SiCl4 MFC set to  0.000000
3/13/2011	8:34:16 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	8:34:16 PM	Tube furnace set to 0
3/13/2011	8:54:16 PM	Helium valve closed
3/13/2011	8:54:16 PM	H2 valve closed
3/13/2011	8:54:16 PM	BCl3 valve closed
3/13/2011	8:54:16 PM	PH3 valve closed
3/13/2011	8:54:16 PM	SiCl4 pre valve closed
3/13/2011	8:54:16 PM	SiCl4 post valve closed
3/13/2011	8:54:16 PM	Main Vac valve closed
3/13/2011	8:54:16 PM	Bypass valve closed
3/13/2011	8:54:16 PM	Bubbler valve closed
3/13/2011	8:54:16 PM	Helium MFC set to  0.000000
3/13/2011	8:54:16 PM	H2 MFC set to  0.000000
3/13/2011	8:54:16 PM	BCl3 MFC set to  0.000000
3/13/2011	8:54:16 PM	PHl3 MFC set to  0.000000
3/13/2011	8:54:16 PM	SiCl4 MFC set to  0.000000
3/13/2011	8:54:16 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	8:54:16 PM	Tube furnace set to 0
3/13/2011	8:54:16 PM	Run finished at 8:54 PM
3/13/2011	9:26:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2011	9:26:35 PM	Recipe started at 9:26 PM
3/13/2011	9:26:35 PM	H2 valve closed
3/13/2011	9:26:35 PM	BCl3 valve closed
3/13/2011	9:26:35 PM	PH3 valve closed
3/13/2011	9:26:35 PM	SiCl4 pre valve closed
3/13/2011	9:26:35 PM	SiCl4 post valve closed
3/13/2011	9:26:35 PM	Main Vac valve closed
3/13/2011	9:26:35 PM	Bypass valve closed
3/13/2011	9:26:35 PM	Bubbler valve closed
3/13/2011	9:26:35 PM	Helium valve opened
3/13/2011	9:26:35 PM	Helium MFC set to  500.000000
3/13/2011	9:26:35 PM	H2 MFC set to  0.000000
3/13/2011	9:26:35 PM	BCl3 MFC set to  0.000000
3/13/2011	9:26:35 PM	PHl3 MFC set to  0.000000
3/13/2011	9:26:35 PM	SiCl4 MFC set to  0.000000
3/13/2011	9:26:35 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	9:26:35 PM	Tube furnace set to 0
3/13/2011	9:26:36 PM	Helium valve closed
3/13/2011	9:26:36 PM	H2 valve closed
3/13/2011	9:26:36 PM	BCl3 valve closed
3/13/2011	9:26:36 PM	PH3 valve closed
3/13/2011	9:26:36 PM	SiCl4 pre valve closed
3/13/2011	9:26:36 PM	SiCl4 post valve closed
3/13/2011	9:26:36 PM	Main Vac valve closed
3/13/2011	9:26:36 PM	Bypass valve closed
3/13/2011	9:26:36 PM	Bubbler valve closed
3/13/2011	9:26:36 PM	Helium MFC set to  0.000000
3/13/2011	9:26:36 PM	H2 MFC set to  0.000000
3/13/2011	9:26:36 PM	BCl3 MFC set to  0.000000
3/13/2011	9:26:36 PM	PHl3 MFC set to  0.000000
3/13/2011	9:26:36 PM	SiCl4 MFC set to  0.000000
3/13/2011	9:26:36 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	9:26:36 PM	Tube furnace set to 0
3/13/2011	9:26:37 PM	Run finished at 9:26 PM
3/13/2011	9:26:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/13/2011	9:32:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/13/2011	9:32:33 PM	Recipe started at 9:32 PM
3/13/2011	9:32:33 PM	Helium valve closed
3/13/2011	9:32:33 PM	H2 valve closed
3/13/2011	9:32:33 PM	BCl3 valve closed
3/13/2011	9:32:33 PM	PH3 valve closed
3/13/2011	9:32:33 PM	SiCl4 pre valve closed
3/13/2011	9:32:33 PM	SiCl4 post valve closed
3/13/2011	9:32:33 PM	Main Vac valve closed
3/13/2011	9:32:33 PM	Bubbler valve closed
3/13/2011	9:32:33 PM	Bypass valve opened
3/13/2011	9:32:33 PM	Helium MFC set to  0.000000
3/13/2011	9:32:33 PM	H2 MFC set to  0.000000
3/13/2011	9:32:33 PM	BCl3 MFC set to  0.000000
3/13/2011	9:32:33 PM	PHl3 MFC set to  0.000000
3/13/2011	9:32:33 PM	SiCl4 MFC set to  0.000000
3/13/2011	9:32:33 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	9:32:33 PM	Tube furnace set to 0
3/13/2011	9:33:06 PM	Helium valve closed
3/13/2011	9:33:06 PM	H2 valve closed
3/13/2011	9:33:06 PM	BCl3 valve closed
3/13/2011	9:33:06 PM	PH3 valve closed
3/13/2011	9:33:06 PM	SiCl4 pre valve closed
3/13/2011	9:33:06 PM	SiCl4 post valve closed
3/13/2011	9:33:06 PM	Bubbler valve closed
3/13/2011	9:33:06 PM	Main Vac valve opened
3/13/2011	9:33:06 PM	Bypass valve opened
3/13/2011	9:33:06 PM	Helium MFC set to  0.000000
3/13/2011	9:33:06 PM	H2 MFC set to  0.000000
3/13/2011	9:33:06 PM	BCl3 MFC set to  0.000000
3/13/2011	9:33:06 PM	PHl3 MFC set to  0.000000
3/13/2011	9:33:06 PM	SiCl4 MFC set to  0.000000
3/13/2011	9:33:06 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	9:33:06 PM	Tube furnace set to 0
3/13/2011	9:34:06 PM	H2 valve closed
3/13/2011	9:34:06 PM	BCl3 valve closed
3/13/2011	9:34:06 PM	PH3 valve closed
3/13/2011	9:34:06 PM	SiCl4 pre valve closed
3/13/2011	9:34:06 PM	SiCl4 post valve closed
3/13/2011	9:34:06 PM	Bubbler valve closed
3/13/2011	9:34:06 PM	Helium valve opened
3/13/2011	9:34:06 PM	Main Vac valve opened
3/13/2011	9:34:06 PM	Bypass valve opened
3/13/2011	9:34:06 PM	Helium MFC set to  100.000000
3/13/2011	9:34:06 PM	H2 MFC set to  0.000000
3/13/2011	9:34:06 PM	BCl3 MFC set to  0.000000
3/13/2011	9:34:06 PM	PHl3 MFC set to  0.000000
3/13/2011	9:34:06 PM	SiCl4 MFC set to  0.000000
3/13/2011	9:34:06 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	9:34:06 PM	Tube furnace set to 0
3/13/2011	9:35:06 PM	Helium valve closed
3/13/2011	9:35:06 PM	H2 valve closed
3/13/2011	9:35:06 PM	BCl3 valve closed
3/13/2011	9:35:06 PM	PH3 valve closed
3/13/2011	9:35:06 PM	SiCl4 pre valve closed
3/13/2011	9:35:06 PM	SiCl4 post valve closed
3/13/2011	9:35:06 PM	Bubbler valve closed
3/13/2011	9:35:06 PM	Main Vac valve opened
3/13/2011	9:35:06 PM	Bypass valve opened
3/13/2011	9:35:06 PM	Helium MFC set to  0.000000
3/13/2011	9:35:06 PM	H2 MFC set to  0.000000
3/13/2011	9:35:06 PM	BCl3 MFC set to  0.000000
3/13/2011	9:35:06 PM	PHl3 MFC set to  0.000000
3/13/2011	9:35:06 PM	SiCl4 MFC set to  0.000000
3/13/2011	9:35:06 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	9:35:06 PM	Tube furnace set to 0
3/13/2011	9:36:06 PM	H2 valve closed
3/13/2011	9:36:06 PM	BCl3 valve closed
3/13/2011	9:36:06 PM	PH3 valve closed
3/13/2011	9:36:06 PM	SiCl4 pre valve closed
3/13/2011	9:36:06 PM	SiCl4 post valve closed
3/13/2011	9:36:06 PM	Bubbler valve closed
3/13/2011	9:36:06 PM	Helium valve opened
3/13/2011	9:36:06 PM	Main Vac valve opened
3/13/2011	9:36:06 PM	Bypass valve opened
3/13/2011	9:36:06 PM	Helium MFC set to  100.000000
3/13/2011	9:36:06 PM	H2 MFC set to  0.000000
3/13/2011	9:36:06 PM	BCl3 MFC set to  0.000000
3/13/2011	9:36:06 PM	PHl3 MFC set to  0.000000
3/13/2011	9:36:06 PM	SiCl4 MFC set to  0.000000
3/13/2011	9:36:06 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	9:36:06 PM	Tube furnace set to 0
3/13/2011	9:37:06 PM	Helium valve closed
3/13/2011	9:37:06 PM	H2 valve closed
3/13/2011	9:37:06 PM	BCl3 valve closed
3/13/2011	9:37:06 PM	PH3 valve closed
3/13/2011	9:37:06 PM	SiCl4 pre valve closed
3/13/2011	9:37:06 PM	SiCl4 post valve closed
3/13/2011	9:37:06 PM	Bubbler valve closed
3/13/2011	9:37:06 PM	Main Vac valve opened
3/13/2011	9:37:06 PM	Bypass valve opened
3/13/2011	9:37:06 PM	Helium MFC set to  0.000000
3/13/2011	9:37:06 PM	H2 MFC set to  0.000000
3/13/2011	9:37:06 PM	BCl3 MFC set to  0.000000
3/13/2011	9:37:06 PM	PHl3 MFC set to  0.000000
3/13/2011	9:37:06 PM	SiCl4 MFC set to  0.000000
3/13/2011	9:37:06 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	9:37:07 PM	Tube furnace set to 0
3/13/2011	9:38:07 PM	H2 valve closed
3/13/2011	9:38:07 PM	BCl3 valve closed
3/13/2011	9:38:07 PM	PH3 valve closed
3/13/2011	9:38:07 PM	SiCl4 pre valve closed
3/13/2011	9:38:07 PM	SiCl4 post valve closed
3/13/2011	9:38:07 PM	Bubbler valve closed
3/13/2011	9:38:07 PM	Helium valve opened
3/13/2011	9:38:07 PM	Main Vac valve opened
3/13/2011	9:38:07 PM	Bypass valve opened
3/13/2011	9:38:07 PM	Helium MFC set to  100.000000
3/13/2011	9:38:07 PM	H2 MFC set to  0.000000
3/13/2011	9:38:07 PM	BCl3 MFC set to  0.000000
3/13/2011	9:38:07 PM	PHl3 MFC set to  0.000000
3/13/2011	9:38:07 PM	SiCl4 MFC set to  0.000000
3/13/2011	9:38:07 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	9:38:07 PM	Tube furnace set to 0
3/13/2011	9:39:07 PM	Helium valve closed
3/13/2011	9:39:07 PM	H2 valve closed
3/13/2011	9:39:07 PM	BCl3 valve closed
3/13/2011	9:39:07 PM	PH3 valve closed
3/13/2011	9:39:07 PM	SiCl4 pre valve closed
3/13/2011	9:39:07 PM	SiCl4 post valve closed
3/13/2011	9:39:07 PM	Bubbler valve closed
3/13/2011	9:39:07 PM	Main Vac valve opened
3/13/2011	9:39:07 PM	Bypass valve opened
3/13/2011	9:39:07 PM	Helium MFC set to  0.000000
3/13/2011	9:39:07 PM	H2 MFC set to  0.000000
3/13/2011	9:39:07 PM	BCl3 MFC set to  0.000000
3/13/2011	9:39:07 PM	PHl3 MFC set to  0.000000
3/13/2011	9:39:07 PM	SiCl4 MFC set to  0.000000
3/13/2011	9:39:07 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	9:39:07 PM	Tube furnace set to 0
3/13/2011	9:40:07 PM	H2 valve closed
3/13/2011	9:40:07 PM	BCl3 valve closed
3/13/2011	9:40:07 PM	PH3 valve closed
3/13/2011	9:40:07 PM	SiCl4 pre valve closed
3/13/2011	9:40:07 PM	SiCl4 post valve closed
3/13/2011	9:40:07 PM	Bubbler valve closed
3/13/2011	9:40:07 PM	Helium valve opened
3/13/2011	9:40:07 PM	Main Vac valve opened
3/13/2011	9:40:07 PM	Bypass valve opened
3/13/2011	9:40:07 PM	Helium MFC set to  100.000000
3/13/2011	9:40:07 PM	H2 MFC set to  0.000000
3/13/2011	9:40:07 PM	BCl3 MFC set to  0.000000
3/13/2011	9:40:07 PM	PHl3 MFC set to  0.000000
3/13/2011	9:40:07 PM	SiCl4 MFC set to  0.000000
3/13/2011	9:40:07 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	9:40:07 PM	Tube furnace set to 0
3/13/2011	9:41:07 PM	Helium valve closed
3/13/2011	9:41:07 PM	H2 valve closed
3/13/2011	9:41:07 PM	BCl3 valve closed
3/13/2011	9:41:07 PM	PH3 valve closed
3/13/2011	9:41:07 PM	SiCl4 pre valve closed
3/13/2011	9:41:07 PM	SiCl4 post valve closed
3/13/2011	9:41:07 PM	Bubbler valve closed
3/13/2011	9:41:07 PM	Main Vac valve opened
3/13/2011	9:41:07 PM	Bypass valve opened
3/13/2011	9:41:07 PM	Helium MFC set to  0.000000
3/13/2011	9:41:07 PM	H2 MFC set to  0.000000
3/13/2011	9:41:07 PM	BCl3 MFC set to  0.000000
3/13/2011	9:41:07 PM	PHl3 MFC set to  0.000000
3/13/2011	9:41:07 PM	SiCl4 MFC set to  0.000000
3/13/2011	9:41:07 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	9:41:07 PM	Tube furnace set to 0
3/13/2011	9:42:07 PM	H2 valve closed
3/13/2011	9:42:07 PM	BCl3 valve closed
3/13/2011	9:42:07 PM	PH3 valve closed
3/13/2011	9:42:07 PM	SiCl4 pre valve closed
3/13/2011	9:42:07 PM	SiCl4 post valve closed
3/13/2011	9:42:07 PM	Bubbler valve closed
3/13/2011	9:42:07 PM	Helium valve opened
3/13/2011	9:42:07 PM	Main Vac valve opened
3/13/2011	9:42:07 PM	Bypass valve opened
3/13/2011	9:42:07 PM	Helium MFC set to  100.000000
3/13/2011	9:42:07 PM	H2 MFC set to  0.000000
3/13/2011	9:42:07 PM	BCl3 MFC set to  0.000000
3/13/2011	9:42:07 PM	PHl3 MFC set to  0.000000
3/13/2011	9:42:07 PM	SiCl4 MFC set to  0.000000
3/13/2011	9:42:07 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	9:42:08 PM	Tube furnace set to 0
3/13/2011	9:43:07 PM	Helium valve closed
3/13/2011	9:43:07 PM	H2 valve closed
3/13/2011	9:43:07 PM	BCl3 valve closed
3/13/2011	9:43:07 PM	PH3 valve closed
3/13/2011	9:43:07 PM	SiCl4 pre valve closed
3/13/2011	9:43:07 PM	SiCl4 post valve closed
3/13/2011	9:43:07 PM	Bubbler valve closed
3/13/2011	9:43:07 PM	Main Vac valve opened
3/13/2011	9:43:07 PM	Bypass valve opened
3/13/2011	9:43:07 PM	Helium MFC set to  0.000000
3/13/2011	9:43:07 PM	H2 MFC set to  0.000000
3/13/2011	9:43:07 PM	BCl3 MFC set to  0.000000
3/13/2011	9:43:07 PM	PHl3 MFC set to  0.000000
3/13/2011	9:43:07 PM	SiCl4 MFC set to  0.000000
3/13/2011	9:43:07 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	9:43:08 PM	Tube furnace set to 0
3/13/2011	9:44:08 PM	H2 valve closed
3/13/2011	9:44:08 PM	BCl3 valve closed
3/13/2011	9:44:08 PM	PH3 valve closed
3/13/2011	9:44:08 PM	SiCl4 pre valve closed
3/13/2011	9:44:08 PM	SiCl4 post valve closed
3/13/2011	9:44:08 PM	Bubbler valve closed
3/13/2011	9:44:08 PM	Helium valve opened
3/13/2011	9:44:08 PM	Main Vac valve opened
3/13/2011	9:44:08 PM	Bypass valve opened
3/13/2011	9:44:08 PM	Helium MFC set to  100.000000
3/13/2011	9:44:08 PM	H2 MFC set to  0.000000
3/13/2011	9:44:08 PM	BCl3 MFC set to  0.000000
3/13/2011	9:44:08 PM	PHl3 MFC set to  0.000000
3/13/2011	9:44:08 PM	SiCl4 MFC set to  0.000000
3/13/2011	9:44:08 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	9:44:08 PM	Tube furnace set to 0
3/13/2011	9:45:08 PM	Helium valve closed
3/13/2011	9:45:08 PM	H2 valve closed
3/13/2011	9:45:08 PM	BCl3 valve closed
3/13/2011	9:45:08 PM	PH3 valve closed
3/13/2011	9:45:08 PM	SiCl4 pre valve closed
3/13/2011	9:45:08 PM	SiCl4 post valve closed
3/13/2011	9:45:08 PM	Bubbler valve closed
3/13/2011	9:45:08 PM	Main Vac valve opened
3/13/2011	9:45:08 PM	Bypass valve opened
3/13/2011	9:45:08 PM	Helium MFC set to  0.000000
3/13/2011	9:45:08 PM	H2 MFC set to  0.000000
3/13/2011	9:45:08 PM	BCl3 MFC set to  0.000000
3/13/2011	9:45:08 PM	PHl3 MFC set to  0.000000
3/13/2011	9:45:08 PM	SiCl4 MFC set to  0.000000
3/13/2011	9:45:08 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	9:45:08 PM	Tube furnace set to 0
3/13/2011	9:46:08 PM	H2 valve closed
3/13/2011	9:46:08 PM	BCl3 valve closed
3/13/2011	9:46:08 PM	PH3 valve closed
3/13/2011	9:46:08 PM	SiCl4 pre valve closed
3/13/2011	9:46:08 PM	SiCl4 post valve closed
3/13/2011	9:46:08 PM	Bubbler valve closed
3/13/2011	9:46:08 PM	Helium valve opened
3/13/2011	9:46:08 PM	Main Vac valve opened
3/13/2011	9:46:08 PM	Bypass valve opened
3/13/2011	9:46:08 PM	Helium MFC set to  100.000000
3/13/2011	9:46:08 PM	H2 MFC set to  0.000000
3/13/2011	9:46:08 PM	BCl3 MFC set to  0.000000
3/13/2011	9:46:08 PM	PHl3 MFC set to  0.000000
3/13/2011	9:46:08 PM	SiCl4 MFC set to  0.000000
3/13/2011	9:46:08 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	9:46:08 PM	Tube furnace set to 0
3/13/2011	9:46:58 PM	Helium valve closed
3/13/2011	9:46:58 PM	H2 valve closed
3/13/2011	9:46:58 PM	BCl3 valve closed
3/13/2011	9:46:58 PM	PH3 valve closed
3/13/2011	9:46:58 PM	SiCl4 pre valve closed
3/13/2011	9:46:58 PM	SiCl4 post valve closed
3/13/2011	9:46:58 PM	Bubbler valve closed
3/13/2011	9:46:58 PM	Main Vac valve opened
3/13/2011	9:46:58 PM	Bypass valve opened
3/13/2011	9:46:58 PM	Helium MFC set to  0.000000
3/13/2011	9:46:58 PM	H2 MFC set to  0.000000
3/13/2011	9:46:58 PM	BCl3 MFC set to  0.000000
3/13/2011	9:46:58 PM	PHl3 MFC set to  0.000000
3/13/2011	9:46:58 PM	SiCl4 MFC set to  0.000000
3/13/2011	9:46:58 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	9:46:58 PM	Tube furnace set to 0
3/13/2011	9:47:58 PM	H2 valve closed
3/13/2011	9:47:58 PM	BCl3 valve closed
3/13/2011	9:47:58 PM	PH3 valve closed
3/13/2011	9:47:58 PM	SiCl4 pre valve closed
3/13/2011	9:47:58 PM	SiCl4 post valve closed
3/13/2011	9:47:58 PM	Bubbler valve closed
3/13/2011	9:47:58 PM	Helium valve opened
3/13/2011	9:47:58 PM	Main Vac valve opened
3/13/2011	9:47:58 PM	Bypass valve opened
3/13/2011	9:47:58 PM	Helium MFC set to  100.000000
3/13/2011	9:47:58 PM	H2 MFC set to  0.000000
3/13/2011	9:47:58 PM	BCl3 MFC set to  0.000000
3/13/2011	9:47:58 PM	PHl3 MFC set to  0.000000
3/13/2011	9:47:58 PM	SiCl4 MFC set to  0.000000
3/13/2011	9:47:58 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	9:47:58 PM	Tube furnace set to 0
3/13/2011	9:48:58 PM	Helium valve closed
3/13/2011	9:48:58 PM	H2 valve closed
3/13/2011	9:48:58 PM	BCl3 valve closed
3/13/2011	9:48:58 PM	PH3 valve closed
3/13/2011	9:48:58 PM	SiCl4 pre valve closed
3/13/2011	9:48:58 PM	SiCl4 post valve closed
3/13/2011	9:48:58 PM	Bubbler valve closed
3/13/2011	9:48:58 PM	Main Vac valve opened
3/13/2011	9:48:58 PM	Bypass valve opened
3/13/2011	9:48:58 PM	Helium MFC set to  0.000000
3/13/2011	9:48:58 PM	H2 MFC set to  0.000000
3/13/2011	9:48:58 PM	BCl3 MFC set to  0.000000
3/13/2011	9:48:58 PM	PHl3 MFC set to  0.000000
3/13/2011	9:48:58 PM	SiCl4 MFC set to  0.000000
3/13/2011	9:48:58 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	9:48:58 PM	Tube furnace set to 0
3/13/2011	9:49:58 PM	H2 valve closed
3/13/2011	9:49:58 PM	BCl3 valve closed
3/13/2011	9:49:59 PM	PH3 valve closed
3/13/2011	9:49:59 PM	SiCl4 pre valve closed
3/13/2011	9:49:59 PM	SiCl4 post valve closed
3/13/2011	9:49:59 PM	Bubbler valve closed
3/13/2011	9:49:59 PM	Helium valve opened
3/13/2011	9:49:59 PM	Main Vac valve opened
3/13/2011	9:49:59 PM	Bypass valve opened
3/13/2011	9:49:59 PM	Helium MFC set to  100.000000
3/13/2011	9:49:59 PM	H2 MFC set to  0.000000
3/13/2011	9:49:59 PM	BCl3 MFC set to  0.000000
3/13/2011	9:49:59 PM	PHl3 MFC set to  0.000000
3/13/2011	9:49:59 PM	SiCl4 MFC set to  0.000000
3/13/2011	9:49:59 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	9:49:59 PM	Tube furnace set to 0
3/13/2011	9:50:59 PM	Helium valve closed
3/13/2011	9:50:59 PM	H2 valve closed
3/13/2011	9:50:59 PM	BCl3 valve closed
3/13/2011	9:50:59 PM	PH3 valve closed
3/13/2011	9:50:59 PM	SiCl4 pre valve closed
3/13/2011	9:50:59 PM	SiCl4 post valve closed
3/13/2011	9:50:59 PM	Bubbler valve closed
3/13/2011	9:50:59 PM	Main Vac valve opened
3/13/2011	9:50:59 PM	Bypass valve opened
3/13/2011	9:50:59 PM	Helium MFC set to  0.000000
3/13/2011	9:50:59 PM	H2 MFC set to  0.000000
3/13/2011	9:50:59 PM	BCl3 MFC set to  0.000000
3/13/2011	9:50:59 PM	PHl3 MFC set to  0.000000
3/13/2011	9:50:59 PM	SiCl4 MFC set to  0.000000
3/13/2011	9:50:59 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	9:50:59 PM	Tube furnace set to 0
3/13/2011	9:51:59 PM	H2 valve closed
3/13/2011	9:51:59 PM	BCl3 valve closed
3/13/2011	9:51:59 PM	PH3 valve closed
3/13/2011	9:51:59 PM	SiCl4 pre valve closed
3/13/2011	9:51:59 PM	SiCl4 post valve closed
3/13/2011	9:51:59 PM	Bubbler valve closed
3/13/2011	9:51:59 PM	Helium valve opened
3/13/2011	9:51:59 PM	Main Vac valve opened
3/13/2011	9:51:59 PM	Bypass valve opened
3/13/2011	9:51:59 PM	Helium MFC set to  100.000000
3/13/2011	9:51:59 PM	H2 MFC set to  0.000000
3/13/2011	9:51:59 PM	BCl3 MFC set to  0.000000
3/13/2011	9:51:59 PM	PHl3 MFC set to  0.000000
3/13/2011	9:51:59 PM	SiCl4 MFC set to  0.000000
3/13/2011	9:51:59 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	9:51:59 PM	Tube furnace set to 0
3/13/2011	9:52:59 PM	Helium valve closed
3/13/2011	9:52:59 PM	H2 valve closed
3/13/2011	9:52:59 PM	BCl3 valve closed
3/13/2011	9:52:59 PM	PH3 valve closed
3/13/2011	9:52:59 PM	SiCl4 pre valve closed
3/13/2011	9:52:59 PM	SiCl4 post valve closed
3/13/2011	9:52:59 PM	Bubbler valve closed
3/13/2011	9:52:59 PM	Main Vac valve opened
3/13/2011	9:52:59 PM	Bypass valve opened
3/13/2011	9:52:59 PM	Helium MFC set to  0.000000
3/13/2011	9:52:59 PM	H2 MFC set to  0.000000
3/13/2011	9:52:59 PM	BCl3 MFC set to  0.000000
3/13/2011	9:52:59 PM	PHl3 MFC set to  0.000000
3/13/2011	9:52:59 PM	SiCl4 MFC set to  0.000000
3/13/2011	9:52:59 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	9:52:59 PM	Tube furnace set to 0
3/13/2011	9:53:00 PM	Run finished at 9:53 PM
3/13/2011	9:53:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/13/2011	10:00:15 PM	Helium MFC set to  50.000000
3/13/2011	10:00:17 PM	Helium valve opened
3/13/2011	10:02:57 PM	Helium valve closed
3/13/2011	10:03:56 PM	Helium valve opened
3/13/2011	10:04:40 PM	Helium valve closed
3/13/2011	10:06:31 PM	Helium valve opened
3/13/2011	10:07:12 PM	Helium MFC set to  0.000000
3/13/2011	10:07:12 PM	Helium valve closed
3/13/2011	10:08:10 PM	Helium MFC set to  5.000000
3/13/2011	10:08:11 PM	Helium valve opened
3/13/2011	10:08:11 PM	Helium valve closed
3/13/2011	10:08:49 PM	Helium valve opened
3/13/2011	10:09:15 PM	Helium MFC set to  6.000000
3/13/2011	10:09:26 PM	Helium MFC set to  8.000000
3/13/2011	10:09:36 PM	Helium valve closed
3/13/2011	10:10:56 PM	Helium MFC set to  50.000000
3/13/2011	10:10:57 PM	Helium valve opened
3/13/2011	10:11:58 PM	Helium valve closed
3/13/2011	10:12:01 PM	Helium MFC set to  0.000000
3/13/2011	10:13:02 PM	Recipe started at 10:13 PM
3/13/2011	10:13:02 PM	Helium valve closed
3/13/2011	10:13:02 PM	BCl3 valve closed
3/13/2011	10:13:02 PM	PH3 valve closed
3/13/2011	10:13:02 PM	SiCl4 pre valve closed
3/13/2011	10:13:02 PM	SiCl4 post valve closed
3/13/2011	10:13:02 PM	Main Vac valve closed
3/13/2011	10:13:02 PM	Bypass valve closed
3/13/2011	10:13:02 PM	Bubbler valve closed
3/13/2011	10:13:02 PM	H2 valve opened
3/13/2011	10:13:02 PM	Helium MFC set to  0.000000
3/13/2011	10:13:02 PM	H2 MFC set to  500.000000
3/13/2011	10:13:02 PM	BCl3 MFC set to  0.000000
3/13/2011	10:13:02 PM	PHl3 MFC set to  0.000000
3/13/2011	10:13:02 PM	SiCl4 MFC set to  0.000000
3/13/2011	10:13:02 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	10:13:02 PM	Tube furnace set to 200
3/13/2011	10:14:19 PM	Helium valve closed
3/13/2011	10:14:19 PM	BCl3 valve closed
3/13/2011	10:14:20 PM	PH3 valve closed
3/13/2011	10:14:20 PM	SiCl4 pre valve closed
3/13/2011	10:14:20 PM	SiCl4 post valve closed
3/13/2011	10:14:20 PM	Main Vac valve closed
3/13/2011	10:14:20 PM	Bypass valve closed
3/13/2011	10:14:20 PM	H2 valve opened
3/13/2011	10:14:20 PM	Bubbler valve opened
3/13/2011	10:14:20 PM	Helium MFC set to  0.000000
3/13/2011	10:14:20 PM	H2 MFC set to  400.000000
3/13/2011	10:14:20 PM	BCl3 MFC set to  0.000000
3/13/2011	10:14:20 PM	PHl3 MFC set to  0.000000
3/13/2011	10:14:20 PM	SiCl4 MFC set to  0.000000
3/13/2011	10:14:20 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	10:14:20 PM	Tube furnace set to 1001
3/13/2011	10:31:20 PM	Helium valve closed
3/13/2011	10:31:20 PM	BCl3 valve closed
3/13/2011	10:31:20 PM	PH3 valve closed
3/13/2011	10:31:20 PM	SiCl4 pre valve closed
3/13/2011	10:31:20 PM	SiCl4 post valve closed
3/13/2011	10:31:20 PM	Main Vac valve closed
3/13/2011	10:31:20 PM	Bypass valve closed
3/13/2011	10:31:20 PM	H2 valve opened
3/13/2011	10:31:20 PM	Bubbler valve opened
3/13/2011	10:31:20 PM	Helium MFC set to  0.000000
3/13/2011	10:31:20 PM	H2 MFC set to  400.000000
3/13/2011	10:31:20 PM	BCl3 MFC set to  0.000000
3/13/2011	10:31:20 PM	PHl3 MFC set to  0.000000
3/13/2011	10:31:20 PM	SiCl4 MFC set to  0.000000
3/13/2011	10:31:20 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	10:31:20 PM	Tube furnace set to 1000
3/13/2011	10:35:20 PM	Helium valve closed
3/13/2011	10:35:20 PM	PH3 valve closed
3/13/2011	10:35:20 PM	Main Vac valve closed
3/13/2011	10:35:20 PM	Bypass valve closed
3/13/2011	10:35:20 PM	H2 valve opened
3/13/2011	10:35:20 PM	BCl3 valve opened
3/13/2011	10:35:20 PM	SiCl4 pre valve opened
3/13/2011	10:35:20 PM	SiCl4 post valve opened
3/13/2011	10:35:20 PM	Bubbler valve opened
3/13/2011	10:35:20 PM	Helium MFC set to  0.000000
3/13/2011	10:35:20 PM	H2 MFC set to  490.000000
3/13/2011	10:35:20 PM	BCl3 MFC set to  3.000000
3/13/2011	10:35:20 PM	PHl3 MFC set to  0.000000
3/13/2011	10:35:20 PM	SiCl4 MFC set to  50.000000
3/13/2011	10:35:20 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	10:35:20 PM	Tube furnace set to 1000
3/13/2011	10:50:20 PM	Helium valve closed
3/13/2011	10:50:20 PM	BCl3 valve closed
3/13/2011	10:50:20 PM	PH3 valve closed
3/13/2011	10:50:20 PM	SiCl4 pre valve closed
3/13/2011	10:50:20 PM	SiCl4 post valve closed
3/13/2011	10:50:20 PM	Main Vac valve closed
3/13/2011	10:50:20 PM	Bypass valve closed
3/13/2011	10:50:20 PM	H2 valve opened
3/13/2011	10:50:20 PM	Bubbler valve opened
3/13/2011	10:50:20 PM	Helium MFC set to  0.000000
3/13/2011	10:50:20 PM	H2 MFC set to  500.000000
3/13/2011	10:50:20 PM	BCl3 MFC set to  0.000000
3/13/2011	10:50:20 PM	PHl3 MFC set to  0.000000
3/13/2011	10:50:20 PM	SiCl4 MFC set to  0.000000
3/13/2011	10:50:20 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	10:50:20 PM	Tube furnace set to 0
3/13/2011	10:53:09 PM	H2 valve closed
3/13/2011	10:53:09 PM	BCl3 valve closed
3/13/2011	10:53:09 PM	PH3 valve closed
3/13/2011	10:53:09 PM	SiCl4 pre valve closed
3/13/2011	10:53:09 PM	SiCl4 post valve closed
3/13/2011	10:53:09 PM	Main Vac valve closed
3/13/2011	10:53:09 PM	Bypass valve closed
3/13/2011	10:53:09 PM	Helium valve opened
3/13/2011	10:53:09 PM	Bubbler valve opened
3/13/2011	10:53:09 PM	Helium MFC set to  400.000000
3/13/2011	10:53:09 PM	H2 MFC set to  0.000000
3/13/2011	10:53:09 PM	BCl3 MFC set to  0.000000
3/13/2011	10:53:09 PM	PHl3 MFC set to  0.000000
3/13/2011	10:53:09 PM	SiCl4 MFC set to  0.000000
3/13/2011	10:53:09 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	10:53:10 PM	Tube furnace set to 0
3/13/2011	11:13:10 PM	Helium valve closed
3/13/2011	11:13:10 PM	H2 valve closed
3/13/2011	11:13:10 PM	BCl3 valve closed
3/13/2011	11:13:10 PM	PH3 valve closed
3/13/2011	11:13:10 PM	SiCl4 pre valve closed
3/13/2011	11:13:10 PM	SiCl4 post valve closed
3/13/2011	11:13:10 PM	Main Vac valve closed
3/13/2011	11:13:10 PM	Bypass valve closed
3/13/2011	11:13:10 PM	Bubbler valve closed
3/13/2011	11:13:10 PM	Helium MFC set to  0.000000
3/13/2011	11:13:10 PM	H2 MFC set to  0.000000
3/13/2011	11:13:10 PM	BCl3 MFC set to  0.000000
3/13/2011	11:13:10 PM	PHl3 MFC set to  0.000000
3/13/2011	11:13:10 PM	SiCl4 MFC set to  0.000000
3/13/2011	11:13:10 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	11:13:10 PM	Tube furnace set to 0
3/13/2011	11:13:10 PM	Run finished at 11:13 PM
3/13/2011	11:19:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/13/2011	11:19:55 PM	Recipe started at 11:19 PM
3/13/2011	11:19:55 PM	Helium valve closed
3/13/2011	11:19:55 PM	H2 valve closed
3/13/2011	11:19:55 PM	BCl3 valve closed
3/13/2011	11:19:55 PM	PH3 valve closed
3/13/2011	11:19:55 PM	SiCl4 pre valve closed
3/13/2011	11:19:55 PM	SiCl4 post valve closed
3/13/2011	11:19:55 PM	Main Vac valve closed
3/13/2011	11:19:55 PM	Bubbler valve closed
3/13/2011	11:19:55 PM	Bypass valve opened
3/13/2011	11:19:55 PM	Helium MFC set to  0.000000
3/13/2011	11:19:55 PM	H2 MFC set to  0.000000
3/13/2011	11:19:55 PM	BCl3 MFC set to  0.000000
3/13/2011	11:19:55 PM	PHl3 MFC set to  0.000000
3/13/2011	11:19:55 PM	SiCl4 MFC set to  0.000000
3/13/2011	11:19:55 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	11:19:55 PM	Tube furnace set to 0
3/13/2011	11:20:26 PM	Helium valve closed
3/13/2011	11:20:26 PM	H2 valve closed
3/13/2011	11:20:26 PM	BCl3 valve closed
3/13/2011	11:20:26 PM	PH3 valve closed
3/13/2011	11:20:26 PM	SiCl4 pre valve closed
3/13/2011	11:20:26 PM	SiCl4 post valve closed
3/13/2011	11:20:26 PM	Bubbler valve closed
3/13/2011	11:20:26 PM	Main Vac valve opened
3/13/2011	11:20:26 PM	Bypass valve opened
3/13/2011	11:20:26 PM	Helium MFC set to  0.000000
3/13/2011	11:20:26 PM	H2 MFC set to  0.000000
3/13/2011	11:20:26 PM	BCl3 MFC set to  0.000000
3/13/2011	11:20:26 PM	PHl3 MFC set to  0.000000
3/13/2011	11:20:26 PM	SiCl4 MFC set to  0.000000
3/13/2011	11:20:26 PM	Bypass solenoid MFC set to  0.000000
3/13/2011	11:20:26 PM	Tube furnace set to 0
3/13/2011	11:20:27 PM	Run finished at 11:20 PM
3/13/2011	11:20:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
